Adaptive MEMS Mirror Control for Position Sensing Accuracy

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Solution Overview

Problem

Conventional MEMS driver circuits use static mirror control parameters, which are not well-suited to handle adverse and changing environmental or operational conditions, leading to impaired performance and accuracy in MEMS mirror actuation and position sensing.

Innovation Solution

Implementing a context-aware MEMS mirror control system that adapts mirror control parameters based on multiple parameters from different categories, such as temperature, acceleration, and electromagnetic interference, to determine the optimal operational state and improve actuation and position sensing accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If static mirror control parameters are used, then device complexity is reduced, but measurement precision and reliability deteriorate under changing environmental conditions

Engineering Contradiction:
Improvecontrol system complexityVSAvoidposition sensing accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent implements dynamic adaptation of mirror control parameters based on real-time monitoring of environmental conditions (temperature, acceleration, electromagnetic interference). The system transitions from static parameters to dynamically adjusted parameters that adapt to changing operational states, thereby maintaining measurement precision without requiring overly complex manual intervention systems

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system employs feedback mechanisms by monitoring environmental parameters and using this information to adjust mirror control parameters. Sensors detect temperature, acceleration, and electromagnetic interference levels, which feed back to the control circuit to automatically adapt the mirror actuation parameters, resolving the contradiction between simplicity and precision

Inventive Principle:
Principle #23Feedback

2Ease of operation

If static mirror control parameters are used, then ease of operation is improved, but reliability deteriorates under adverse environmental conditions

Engineering Contradiction:
Improveoperational simplicityVSAvoidactuation reliability
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The control system performs self-adjustment by automatically monitoring environmental conditions and adapting mirror control parameters without external intervention. The system serves itself by detecting changes in temperature, acceleration, and electromagnetic interference and autonomously modifying operational parameters to maintain reliability under varying conditions

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system changes operational parameters dynamically based on environmental conditions. By adjusting control parameters according to monitored temperature, acceleration, and electromagnetic interference levels, the system maintains reliable operation across diverse environmental conditions while keeping the user interface simple

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If adaptive control based on multiple sensor parameters is implemented, then measurement precision and reliability are improved, but device complexity increases

Engineering Contradiction:
Improveposition sensing accuracyVSAvoidcontrol system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent segments the control system into distinct functional modules: environmental sensing subsystem (temperature, acceleration, electromagnetic interference sensors), parameter monitoring subsystem, and adaptive control subsystem. This segmentation allows each module to perform its specific function independently, managing overall system complexity while achieving high measurement precision through coordinated operation of specialized components

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS10877264B2Adaptive and context-aware micro-electro-mechanical systems (MEMS) mirror control
Publication Date: 2020.12.29 INFINEON TECHNOLOGIES AG
  • US10877264B2 patent drawing
  • US10877264B2 patent drawing
  • US10877264B2 patent drawing

AI summary

A system may include a micro-electro-mechanical systems (MEMS) mirror and a MEMS driver circuit. The MEMS driver circuit may obtain a plurality of items of monitoring information associated with the MEMS mirror. The plurality of items of monitoring information may include at least one of sensor information received from one or more sensors associated with the MEMS mirror, or operation information received from a controller associated with the system. The MEMS driver circuit may determine a state of the MEMS mirror based on the plurality of items of monitoring information. The MEMS driver circuit may adapt a mirror control parameter, associated with controlling the MEMS mirror, based on the state of the MEMS mirror.