Adaptive Mirror Mediator Layers for Aberration Correction
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Solution Overview
Problem
In microlithographic projection exposure apparatuses, existing adaptive mirrors face challenges in correcting aberrations quickly while minimizing heat generation, particularly in scenarios requiring fast response times due to the limitations of mediator layers with high electrical resistance.
Innovation Solution
The use of two separate mediator layers with different electrical resistances, one for fast potential propagation and the other for limiting electrical power, allows for targeted correction of aberrations on varying timescales, optimizing deformation amplitudes and reducing heat generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a mediator layer with high electrical resistance is used to limit electrical power, then heat generation is reduced, but potential propagation speed decreases
Solution Approach 1:
The mediator layer is segmented into two distinct layers: a first mediator layer with high electrical resistance for limiting power and reducing heat, and a second mediator layer with low electrical resistance for fast potential propagation. This segmentation allows each layer to specialize in one function, resolving the contradiction between heat reduction and speed.
Solution Approach 2:
The second mediator layer with low resistance acts as an intermediary that enables fast potential propagation between the electrodes, while the first mediator layer with high resistance serves as the primary power-limiting barrier. The combination allows the system to achieve both fast response and heat reduction.
2Adaptability or versatility
If a single mediator layer is used, then device complexity is reduced, but the ability to optimize for both fast response and heat reduction is compromised
Solution Approach 1:
The mediator layer is divided into two functionally distinct layers, allowing independent optimization of each layer's electrical resistance for its specific purpose. This segmentation enables the system to achieve both fast response times and heat reduction, justifying the increased structural complexity.
Solution Approach 2:
Different regions of the mediator structure have different electrical resistance properties: the first mediator layer has high resistance for power limiting, while the second mediator layer has low resistance for fast propagation. This local differentiation of properties allows simultaneous optimization for conflicting requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables effective correction of aberrations with minimal heat generation by dividing tasks between mediator layers with distinct resistances, facilitating fast and slow operation scenarios, thereby improving the performance of adaptive mirrors in microlithographic projection exposure apparatuses.
Implementation Method 1
an actuator layer composed of a piezoelectric material, wherein an electric field having a locally varying strength is generated across this piezoelectric layer by an electrical voltage being applied to electrodes arranged on both sides with respect to the piezoelectric layer
Implementation Method 2
a reflection layer stack for reflecting electromagnetic radiation that is incident on the optical effective surface
Data Source
AI summary
A mirror that has a mirror substrate (12), a reflection layer stack (21) reflecting electromagnetic radiation incident on the optical effective surface (11), and at least one piezoelectric layer (16) arranged between the mirror substrate and the reflection layer stack and to which an electric field for producing a locally variable deformation is applied by way of a first electrode arrangement and a second electrode arrangement situated on alternate sides of the piezoelectric layer. In one aspect, both the first and the second electrode arrangements have a plurality of electrodes (20a, 20b), to each of which an electrical voltage relative to the respective other electrode arrangement can be applied via leads (19a, 19b). Separate mediator layers (17a, 17b) set continuous electrical potential profiles along the respective electrode arrangement, and where said mediator layers differ from one another in their average electrical resistance by a factor of at least 1.5.