Adaptive Optics for Aberration Compensation in Plasma Cells

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Solution Overview

Problem

Laser-sustained plasma light sources face challenges due to optical aberrations, which result in larger than desired plasma volumes and irreproducible plasma shapes, as existing methods rely on minimizing bulb aberrations and fail to address aberrations caused by other optical elements and convection within the plasma light source.

Innovation Solution

The use of adaptive optics elements positioned along the illumination pathway between the illumination source and the plasma cell to compensate for aberrations produced by optical elements and convection, with a wavefront sensor and controller to adjust the optics and minimize wavefront error.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If adaptive optics elements are added to compensate for aberrations, then plasma shape control and reproducibility are improved, but device complexity increases

Engineering Contradiction:
Improveplasma shape controlVSAvoidoptical system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

An adaptive optics element is introduced as an intermediary component in the illumination pathway between the illumination source and plasma cell. This mediator actively compensates for optical aberrations by adjusting its optical properties based on feedback from a wavefront sensor, thereby improving plasma shape control without requiring fundamental changes to the plasma cell structure itself.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system implements a feedback loop where a wavefront sensor measures optical aberrations in real-time, and this information is used to control the adaptive optics element. This closed-loop feedback mechanism enables dynamic compensation of aberrations, improving plasma shape reproducibility while managing system complexity through intelligent control rather than purely mechanical means.

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If bulb aberrations are minimized through manufacturing, then plasma shape predictability is improved, but ability to correct aberrations from other optical elements and convection is insufficient

Engineering Contradiction:
Improveplasma shape predictabilityVSAvoidaberration correction capability
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The system transitions from static aberration correction (fixed during manufacturing) to dynamic correction. The adaptive optics element can change its optical properties in real-time based on actual operating conditions, allowing it to compensate for various sources of aberrations including those from different optical elements and convection effects that cannot be addressed by bulb manufacturing alone.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The adaptive optics element modifies optical parameters such as wavefront shape, focal position, or lens curvature dynamically to compensate for aberrations. This parameter adjustment capability allows the system to adapt to different operating conditions and correct multiple types of aberrations that arise from various optical elements and plasma convection, going beyond what fixed manufacturing tolerances can achieve.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively corrects aberrations, leading to more predictable and controlled plasma shapes, reducing the size of plasma volumes and improving reproducibility by continuously compensating for aberrations caused by both optical elements and convection.

Implementation Method 1

one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements

Methodology Applied
Scientific EffectAdaptive optics wavefront correction:

Implementation Method 2

an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas

Methodology Applied
Scientific EffectOptical focusing: Focusing

Implementation Method 3

Laser-sustained plasma light sources operate by focusing laser radiation into a gas volume in order to excite the gas, such as argon or xenon, into a plasma state

Methodology Applied
Scientific EffectPlasma generation through laser pumping: Laser

Data Source

PatentUS9097577B2Adaptive optics for compensating aberrations in light-sustained plasma cells
Publication Date: 2015.08.04 KLA CORP
  • US9097577B2 patent drawing
  • US9097577B2 patent drawing
  • US9097577B2 patent drawing

AI summary

A system for compensating abberative effects caused by a bulb of a plasma cell includes an illumination source configured to generate illumination; a plasma cell, the plasma cell including a bulb for containing a volume of gas; an ellipse configured to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas; and one or more adaptive optical elements configured to compensate for aberrations produced by one or more optical elements, the one or more adaptive optics elements positioned along an illumination pathway between the illumination source and the plasma cell.