Adaptive Value Capture for Semiconductor Test Data Analysis

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Solution Overview

Problem

Automated test equipment (ATE) faces challenges in efficiently monitoring and analyzing critical test data in real-time, particularly in identifying failing or marginal tests during semiconductor wafer testing, which delays the detection of process issues and increases unnecessary testing time.

Innovation Solution

Implementing a method that selects a subset of critical tests for real-time evaluation based on historical data analysis, using a statistical process control framework with an adaptive value capture module to monitor and analyze only 'interesting' test data, such as failing, marginal, or trending tests, allowing for proactive process control actions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If all test data is monitored and analyzed in real-time, then measurement precision is improved, but loss of time increases due to processing overhead

Engineering Contradiction:

Improvedetection accuracyVSAvoidtesting time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The patent segments test data into different priority levels (critical/failing tests versus passing tests). The adaptive value capture module selectively captures and analyzes only critical test data in real-time, while passing tests are processed batch-wise after completion. This segmentation resolves the contradiction by focusing computational resources on data that truly requires immediate attention.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The patent applies different quality levels of monitoring to different portions of test data. Critical tests receive high-quality real-time analysis with immediate alerting, while passing tests receive standard post-processing analysis. This local quality approach optimizes detection precision where it matters most while minimizing overall processing time.

Inventive Principle:

Principle #3Local quality

2Productivity

If a subset of critical tests is selected for real-time evaluation, then productivity is improved, but measurement precision may worsen due to selective monitoring

Engineering Contradiction:

Improvetesting efficiencyVSAvoiddetection accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The adaptive value capture module performs preliminary action by identifying and flagging critical tests during the testing process itself, before all tests complete. This allows early detection of failures and immediate alerting, improving productivity without sacrificing detection precision for critical parameters.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system implements feedback mechanisms where real-time analysis of critical tests provides immediate information about process status. This feedback loop enables rapid response to failures while maintaining high detection precision for the selected critical subset, resolving the contradiction between selective monitoring and measurement accuracy.

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS9905483B2Adaptive value capture for process monitoring

Publication Date: 2018.02.27 ADVANTEST CORP

AI summary

A method for analyzing test results. The method includes selecting a first subset of tests from a plurality of tests. Test results are gathered from the plurality of tests in real-time. A first statistical analysis is performed on test results from the first subset of tests. At least one process control rule is initiated as determined by results of the first statistical analysis performed on the test results from the first subset of tests.