Adaptive Valve Start Position for Mass Flow Controller Response

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Solution Overview

Problem

Mass flow controllers (MFCs) experience long response delays and poor performance when transitioning from a zero valve position to a non-zero set point, as the closed-loop control system takes time to adjust and respond effectively.

Innovation Solution

Implementing an adaptive valve start component that provides an adjustable non-zero starting control signal to the control valve based on calibration data and runtime data, allowing the MFC to quickly respond to set point signals by moving from a zero value to a calibrated non-zero value, thereby reducing response delays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the MFC uses a closed-loop control system with a sensor to measure mass flow rate and adjust the control valve, then the control precision is improved, but the response time deteriorates when transitioning from zero valve position to non-zero set point

Engineering Contradiction:
Improvemass flow rate control precisionVSAvoidresponse delay
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies preliminary action by pre-calculating and storing optimal valve positions corresponding to various mass flow rates in a lookup table during a calibration phase. When a set point is received, the controller directly retrieves the pre-computed valve position from the lookup table rather than performing real-time iterative calculations, enabling immediate valve adjustment and eliminating computational delay while maintaining precise flow control.

Inventive Principle:
Principle #10Preliminary action

2Stability of the object's composition

If the MFC waits for the valve to move from zero position to a position where noticeable flow appears before the closed-loop algorithm starts working, then the system stability is improved, but the response time deteriorates

Engineering Contradiction:
Improvecontrol system stabilityVSAvoidresponse delay
Core Design Contradiction:
Stability of the object's compositionVSLoss of time

Solution Approach 1:

The system performs preliminary computation during a calibration phase, storing optimal valve positions for various flow rates in a lookup table. This pre-computation eliminates the need for real-time iterative calculations, allowing the controller to immediately retrieve and apply the correct valve position when a set point is received, thus maintaining stability while eliminating response delay.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements dynamics by using an adaptive lookup table that can be updated and refined over time. The system learns from operational data and adjusts the stored valve position mappings to optimize performance under different conditions, enabling the controller to dynamically adapt to changing system characteristics while maintaining fast response times through direct table lookup.

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If the MFC uses traditional calibration methods during manufacturing, then the manufacturing precision is improved, but the adaptability to runtime conditions deteriorates

Engineering Contradiction:
Improvevalve positioning precisionVSAvoidadaptation to runtime variations
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The system performs preliminary calibration during manufacturing to establish initial valve position mappings, but also incorporates runtime adaptation capabilities. The lookup table is initially populated with manufacturer calibration data for precise positioning, then progressively refined during operational phases using actual runtime measurements, combining manufacturing precision with runtime adaptability.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system applies self-service by automatically updating its own lookup table using runtime operational data. The controller monitors actual flow rates and valve positions, identifies discrepancies from the stored calibration data, and autonomously adjusts the lookup table entries to optimize performance, enabling continuous self-improvement without external intervention.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution significantly improves the response time and performance of MFCs by enabling immediate movement from a zero position to a position where noticeable flow occurs, enhancing the overall operation of the mass flow controller.

Implementation Method 1

a thermal mass flow sensor that provides an indication of the flow rate of the fluid

Methodology Applied
Scientific EffectThermal mass flow measurement:

Data Source

PatentUS8915262B2Mass flow controller algorithm with adaptive valve start position
Publication Date: 2014.12.23 PROTERIAL LTD
  • US8915262B2 patent drawing
  • US8915262B2 patent drawing
  • US8915262B2 patent drawing

AI summary

A mass flow controller (MFC), a method for calibrating an MFC, and a method for operating an MFC are disclosed. The MFC may include a valve that is adjustable between a closed position and an open position to control a flow rate of a fluid responsive to a control signal, a thermal mass flow sensor that provides an indication of the flow rate of the fluid, calibration data including data that relates the control signal to the flow rate of the fluid at a plurality of fluid flow rates, and a control system that provides, based upon the calibration data and run time data, an adjustable non-zero starting control signal to the valve when the valve is closed to more quickly respond to a set point signal.