ADC Camera Horizontal Displacement for Monocrystalline Silicon Ingot Growth
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Solution Overview
Problem
In the Czochralski method for growing monocrystalline silicon ingots, the adjustment of automatic diameter control (ADC) cameras is delayed, leading to inaccuracies in monitoring and controlling the growth diameter, requiring repeated adjustments and impacting the quality of the ingots.
Innovation Solution
A method and apparatus that calculate the horizontal displacement of the ADC camera based on the geometric relationship between the height variation of the thermal field accessories and the solid-liquid interface, allowing for timely and accurate adjustment of the camera position to ensure consistent growth diameter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the ADC camera adjustment is performed after the thermal field accessories are adjusted, then the camera can be adjusted to monitor the growth diameter, but the adjustment is delayed and requires repeated adjustments leading to inaccuracies
Solution Approach 1:
The patent calculates and determines the target position of the ADC camera in advance before the actual monitoring process begins. By pre-calculating the horizontal displacement based on the geometric relationship between the thermal field accessory adjustment and the solid-liquid interface, the camera position is determined beforehand, eliminating the need for repeated adjustments and reducing time loss during the ingot growth monitoring process.
2Measurement precision
If the ADC camera is adjusted repeatedly to achieve accurate positioning, then the measurement accuracy improves, but the process time increases and productivity decreases
Solution Approach 1:
The patent establishes a feedback mechanism where the horizontal displacement of the ADC camera is calculated based on the adjustment amount of the thermal field accessories and the geometric relationship with the solid-liquid interface. This feedback loop allows the system to automatically determine the correct camera position without repeated trial adjustments, thereby maintaining high measurement precision while improving productivity by eliminating time-consuming iterative adjustments.
3Manufacturing precision
If the thermal field accessories are adjusted to control the growth diameter, then the ingot quality improves, but the ADC camera positioning becomes inaccurate without timely adjustment
Solution Approach 1:
The patent performs preliminary calculation of the ADC camera's horizontal displacement based on the thermal field accessory adjustment amounts and the geometric relationship with the solid-liquid interface. This preliminary action ensures that the camera is positioned accurately before the growth diameter monitoring begins, maintaining both the manufacturing precision of the ingot growth control and the measurement precision of the ADC camera monitoring simultaneously.
Data Source
AI summary
A method for accurately adjusting an automatic diameter control (ADC) camera includes before pulling a monocrystalline silicon ingot, obtaining a height variation value of an ADC camera from a solid-liquid interface of a melt by separately comparing variations of thermal field accessories provided corresponding to the monocrystalline silicon ingot and a previous monocrystalline silicon ingot. Based on a geometric relationship between the height variation value and a horizontal displacement of the ADC camera, a horizontal displacement of the ADC camera is obtained according to the height variation value, wherein the horizontal displacement is a first horizontal displacement or a second horizontal displacement. The method also includes moving the ADC camera horizontally to a target position according to the horizontal displacement of the ADC camera.