Additive Electrostatic Chuck Base for Seamless Cooling Channels
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for manufacturing electrostatic chuck bases are costly and inefficient, requiring complex machining techniques and expensive bonding processes like vacuum brazing to form internal cooling channels.
Innovation Solution
The use of additive manufacturing techniques, such as selective laser melting, to form a continuous base structure with enclosed cooling channels directly, eliminating the need for separate piece bonding and reducing material and processing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional machining and bonding methods are used to form internal cooling channels, then the base structure can be created with enclosed channels, but the manufacturing cost and complexity increase significantly
Solution Approach 1:
The patent combines multiple manufacturing operations (forming the base structure and creating internal cooling channels) into a single additive manufacturing process. This eliminates the need for separate machining and bonding steps, directly resolving the technical contradiction by simplifying the manufacturing process while maintaining the capability to create enclosed cooling channels within the base structure
Solution Approach 2:
The additive manufacturing process performs preliminary action by creating the internal cooling channel geometry during the base structure formation itself, before any assembly or bonding operations. This preliminary formation of channels eliminates subsequent complex machining and bonding steps, thereby reducing manufacturing complexity
2Ease of manufacture
If vacuum brazing is used to bond separate base pieces, then internal cooling channels can be formed, but material and processing costs increase
Solution Approach 1:
The patent merges the base structure formation and cooling channel creation into a single additive manufacturing operation, eliminating vacuum brazing and associated filler materials. This directly reduces material and processing costs while the additive process inherently maintains manufacturing precision through its layer-by-layer construction method
Solution Approach 2:
The additive manufacturing process replaces expensive vacuum brazing operations and specialized filler materials with a more economical direct deposition process. The method uses readily available metal powders and standard additive manufacturing equipment, significantly reducing material and processing costs while maintaining channel precision
3Manufacturing precision
If complex machining techniques are used to form high precision base structures, then precise dimensions and flatness can be achieved, but manufacturing time and costs increase
Solution Approach 1:
The patent replaces traditional mechanical machining operations with additive manufacturing technology. This substitution eliminates time-consuming CNC machining, milling, and grinding operations while directly achieving the required base structure precision through controlled material deposition. The additive process simultaneously builds the structure and creates internal cooling channels, dramatically improving manufacturing efficiency
Solution Approach 2:
The additive manufacturing process performs preliminary action by pre-forming the complete base structure with integrated cooling channels in a single construction process. This eliminates subsequent machining operations that would otherwise be required to achieve precise dimensions and flatness, thereby significantly reducing manufacturing time while maintaining precision requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the creation of precise, intricate cooling channels and a seamless base structure with improved thermal performance and reduced manufacturing time and costs.
Implementation Method 1
additive manufacturing techniques, such as selective laser melting
Data Source
AI summary
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.