Additive Manifold with 3D Flow Paths for Semiconductor Gas Distribution
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Solution Overview
Problem
Conventional semiconductor gas distribution systems face challenges such as long flow path lengths, multiple failure points, high space consumption, difficulty in access and maintenance, and adverse effects on fluid flow due to sharp internal edges, misalignments, and discontinuities in traditional manufacturing techniques, which limit the creation of intricate three-dimensional flow paths without sharp edges.
Innovation Solution
The use of additive manufacturing to create a manifold with fluid flow components linked to a common mixing chamber via equal-length flow passages, arranged in a circular pattern, with three-dimensional fluid flow passages and no sharp internal edges, enabling improved fluid routing, manufacturability, and maintainability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If traditional manufacturing techniques are used to create gas distribution manifolds, then the manufacturing process is well-established and reliable, but the flow paths contain sharp internal edges, misalignments, and discontinuities that adversely affect fluid flow
Solution Approach 1:
The patent applies parameter changes by transitioning from traditional subtractive or formative manufacturing methods to additive manufacturing. This fundamental manufacturing parameter change enables the creation of smooth, continuous three-dimensional flow paths without sharp internal edges or misalignments, directly resolving the fluid flow adverse effects while maintaining manufacturing reliability through established additive manufacturing processes
Solution Approach 2:
The patent utilizes another dimension by creating truly three-dimensional flow paths that cannot be achieved with conventional two-dimensional machining approaches. The additive manufacturing process enables complex spatial routing of gas flow paths with smooth transitions in three-dimensional space, eliminating the sharp edges and discontinuities inherent in traditional planar manufacturing methods
2Adaptability or versatility
If conventional gas distribution systems with multiple control hardware components are used, then each process gas can be controlled separately, but the system consumes significant space and has multiple failure points
Solution Approach 1:
The patent applies merging by integrating multiple previously separate components (manifold body, flow paths, distribution points, and control interfaces) into a single additively manufactured manifold structure. This consolidation eliminates multiple connection points and interfaces that could fail, reducing the total number of failure points while maintaining the ability to control multiple process gases through integrated flow path design
Solution Approach 2:
The patent applies universality by designing a multifunctional manifold that simultaneously performs gas distribution, flow path routing, and structural support functions within a single component. The additively manufactured manifold serves multiple purposes: distributing multiple process gases, providing smooth three-dimensional flow paths, and eliminating the need for separate connection hardware, thereby reducing failure points while maintaining gas control versatility
3Device complexity
If conventional gas distribution systems with linear flow paths are used, then the system layout is simple, but the flow path lengths are long and space consumption is high
Solution Approach 1:
The patent applies another dimension by transitioning from linear, two-dimensional flow path layouts to compact three-dimensional flow paths. The additive manufacturing process enables gas flow paths to route through three-dimensional space with optimized routing, significantly reducing flow path lengths and space consumption while maintaining simple system operation through integrated design
Solution Approach 2:
The patent applies nested doll by creating compact, space-efficient flow paths that are nested within the manifold structure itself. The three-dimensional flow paths are embedded within the manifold body, allowing gas to travel through optimized routes that minimize length while maintaining simple system layout and easy access to distribution points
4Ease of manufacture
If traditional manifolds with difficult-to-access internal structures are used, then the manufacturing process is straightforward, but access and maintenance become difficult
Solution Approach 1:
The patent applies another dimension by creating externally accessible three-dimensional flow paths and distribution points that are open to the exterior of the manifold. The additive manufacturing process enables the creation of flow paths with external openings and accessible interfaces, allowing easy maintenance and inspection without disassembling the manifold, while maintaining manufacturing straightforwardness through single-step additive fabrication
Data Source
AI summary
Methods and apparatuses for additively manufactured tubular passages, additively manufactured manifolds, and additively manufactured heaters are provided.