Additive Polymer for Block Copolymer Directed Self-Assembly

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Current directed self-assembly (DSA) methods for block copolymers require tight control of polymer compositions and multiple processing steps, limiting the ease of achieving good alignment and pattern density, especially in optical lithography applications.

Innovation Solution

A composition comprising a block copolymer and an additive polymer with a reactive moiety that reacts with the substrate, allowing for a one-step process where the block copolymer forms phase-separated domains parallel to the substrate, simplifying the manufacturing process and improving pattern alignment and density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a two-step process involving brush coating followed by block copolymer application is used, then good directed self-assembly alignment can be achieved, but the process complexity increases and the composition control range becomes tightly restricted

Engineering Contradiction:

Improvealignment qualityVSAvoidprocess steps

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines the brush coating step and block copolymer application step into a single composition applied in one step. The composition contains both the polymer providing substrate interaction and the block copolymer forming domains, eliminating the need for sequential processing while maintaining alignment quality.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single composition serves multiple functions simultaneously: it provides substrate adhesion through the interactive polymer component and forms the self-assembled domain pattern through the block copolymer component. This multi-functional design replaces the specialized roles of separate brush and BCP layers.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If a two-step process with separate brush and block copolymer application is used, then domain alignment can be achieved, but the number of processing steps increases reducing productivity

Engineering Contradiction:

Improvedomain alignmentVSAvoidprocessing efficiency

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent merges multiple processing steps into a single application step by formulating a unified composition containing both functional polymer components. This single-step application maintains domain alignment quality while significantly improving processing efficiency by eliminating intermediate steps.

Inventive Principle:

Principle #5Merging (Combining)

3Manufacturing precision

If tight control of polymer composition is maintained in the two-step method, then good DSA results are achieved, but the ease of manufacture decreases

Engineering Contradiction:

ImproveDSA result qualityVSAvoidcomposition control flexibility

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent changes the formulation approach by creating a single composition with specific component ratios rather than requiring tight control of separate polymer applications. This parameter change in the formulation strategy provides broader manufacturing flexibility while maintaining DSA quality through the designed interaction between composition components.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the manufacturing process, reduces the number of processing steps, and significantly widens the process window for achieving good directed self-assembly, enabling better domain alignment and pattern quality compared to traditional two-step methods.

Implementation Method 1

an additive polymer; where the additive polymer comprises a reactive moiety that is reacted to a substrate upon which it is disposed

Methodology Applied

Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 2

the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure

Methodology Applied

Scientific EffectPhase separation:

Implementation Method 3

annealing the composition to facilitate bonding or complexation or coordination of the additive polymer to the substrate and domain separation between the first polymer and the second polymer of the block copolymer

Methodology Applied

Scientific EffectThermal heating: Heating

Data Source

PatentUS10011713B2Copolymer formulation for directed self assembly, methods of manufacture thereof and articles comprising the same

Publication Date: 2018.07.03 DUPONT ELECTRONIC MATERIALS INT LLC

AI summary

Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; and an additive polymer; where the additive polymer comprises a reactive moiety that is reacted to a substrate upon which it is disposed; and where the additive polymer comprises a homopolymer that is the chemically and structurally the same as one of the polymers in the block copolymer or where the additive polymer comprises a random copolymer that has a preferential interaction with one of the blocks of the block copolymers.