Address-Transparent Device for Semiconductor Fab Network Coupling

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Solution Overview

Problem

Current semiconductor fab systems lack a cost-effective solution for adding services without significant delays or fees associated with obtaining new IP addresses, and existing intelligent controllers struggle to provide simultaneous, statistically repeatable responsiveness and error control in data collection and communication processes.

Innovation Solution

An address-transparent device is introduced that couples between two network interfaces, allowing for packet routing independent of any protocol, intercepting, forwarding, and rerouting data streams while providing a failsafe switch mechanism to ensure continuous operation in case of device failure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a new intelligent controller is added to mediate communications between tools/sensors and hosts, then data collection and control capabilities are enhanced, but the system complexity and difficulty of integration increase

Engineering Contradiction:
Improvedata collection and control capabilitiesVSAvoidsystem integration complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent introduces an intelligent controller as an intermediary device positioned between the tools/sensors and hosts. This controller mediates communications by receiving data from tools and sensors through one interface and communicating with hosts through another interface, thereby enhancing data collection and control capabilities while isolating the complexity of integration from both the tools and hosts.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system is segmented into distinct functional components: tools, sensors, the intelligent controller, and hosts. The intelligent controller is further segmented into separate interfaces - one facing the tools/sensors and another facing the hosts. This segmentation allows each component to be independently designed, configured, and maintained, reducing overall system integration complexity.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If protocol-independent packet routing is implemented, then adaptability to different communication standards is improved, but the device complexity increases

Engineering Contradiction:
Improveprotocol compatibilityVSAvoidrouting device complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The intelligent controller is designed with universal communication capabilities, implementing multiple communication protocols (such as SECS/GEM, TCP/IP, and serial protocols) within a single device. This allows the controller to adapt to different communication standards and interface with various tools and hosts without requiring separate dedicated devices for each protocol, thereby achieving protocol compatibility while managing device complexity through consolidation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS7787477B2Address-transparent device and method
Publication Date: 2010.08.31 MKS INSTR INC
  • US7787477B2 patent drawing
  • US7787477B2 patent drawing
  • US7787477B2 patent drawing

AI summary

An address-transparent device is disclosed that couples two networks in a semiconductor fab and communicates packets between a host on a first network and a tool on a second network. Optionally, the address-transparent device intercepts packets for local use by a data consumer that resides within or outside of the address-transparent device. The address-transparent device can intercept all or a portion of data streams. As another option, the address-transparent device reroutes packet to another destination by changing the header of the received packet.