Adhesion-Improving Fluid for Immersion Exposure Protective Film
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Solution Overview
Problem
In the semiconductor manufacturing process, the adhesion of a water-repellent protective film to a silicon substrate is inadequate during immersion exposure, leading to peeling issues due to pressure from the liquid layer and complex surface shapes, which can result in defects and contamination.
Innovation Solution
A coating and developing apparatus with an adhesion-improving processor that supplies an adhesion-improving fluid, such as hexamethyldisilazane, to the exposed surface before forming the protective film, enhancing its adhesion to the substrate and preventing peeling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a water-repellent protective film is formed on the substrate to protect the resist film from liquid during immersion exposure, then the protective function is improved, but the adhesion of the protective film to the substrate deteriorates, causing peeling
Solution Approach 1:
The patent introduces an adhesion-improving fluid as an intermediary substance between the substrate and the protective film. This fluid contains adhesion promoters that chemically or physically bond to both the substrate surface and the protective film, creating a strong intermediate layer that prevents peeling while maintaining the water-repellent protective function.
Solution Approach 2:
The patent applies the adhesion-improving fluid to the substrate surface before forming the protective film. This preliminary treatment modifies the substrate surface properties (such as creating hydrophobic regions or chemical bonding sites) to ensure optimal adhesion of the subsequently applied protective film, preventing peeling issues during immersion exposure.
2Reliability
If the protective film adhesion is improved to prevent peeling, then the process integrity is maintained, but additional processing steps are required
Solution Approach 1:
The patent combines the adhesion improvement function with the protective film formation process by integrating the adhesion-improving fluid application into the existing coating workflow. The fluid is applied in the same processing chamber or sequence as the protective film deposition, merging two functions (adhesion enhancement and protection) into a unified process step rather than requiring separate additional equipment or stages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved adhesion of the protective film to the substrate prevents peeling during immersion exposure, ensuring a normal developing process and reducing contamination from particles, thus maintaining process integrity and quality.
Implementation Method 1
supplying an adhesion-improving fluid, such as hexamethyldisilazane, to the exposed surface before forming the protective film, enhancing its adhesion to the substrate
Implementation Method 2
a light-transmitting, water-repellant, thin film formed of an organic material, especially a fluorine-based material to protect the resist film from the liquid used in immersion exposure
Data Source
AI summary
Disclosed is a technique for preventing a water-repellent protective film formed on a resist film from peeling off during immersion exposure. A resist film is formed on the front surface of a substrate and then the peripheral edge portion of the resist film is removed. Before forming a water-repellent protective film onto the resist film, an adhesion-improving fluid, preferably hexamethyldisilazane gas, for improving the adhesion of the water-repellent protective film, is supplied to the region from which the resist film is removed.