Adhesive Bonding for Superconducting Multichip Modules

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Solution Overview

Problem

Existing multichip module fabrication techniques for superconducting circuits face challenges with thermal cycling, vibration tolerance, and adhesion issues due to differential thermal expansion, leading to unreliable bonds and mechanical instability, especially at cryogenic temperatures.

Innovation Solution

A non-conductive adhesive with matched coefficients of thermal expansion between the chip and substrate is used to bond wafers, eliminating the need for solder reflow and providing a reworkable bond, which enhances mechanical stability and reliability under various environmental conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If solder reflow bonding is used to connect wafers to substrate, then electrical and mechanical bonding is achieved, but thermal cycling and vibration cause bond failure due to differential thermal expansion

Engineering Contradiction:
Improvebond reliabilityVSAvoidthermal expansion matching
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The patent changes the bonding method from solder reflow to adhesive bonding, and specifically selects an adhesive with thermal expansion properties that match both the wafer and substrate materials. This parameter change in the bonding material's thermal characteristics eliminates the differential expansion problem that causes solder joint failure during thermal cycling.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a composite adhesive material that combines polymer matrix with specific fillers to achieve matched thermal expansion coefficients. This composite approach allows tuning the thermal properties of the adhesive to match the superconducting wafer and substrate, preventing bond failure while maintaining electrical insulation.

Inventive Principle:
Principle #40Composite materials

2Strength

If elevated temperatures are used for solder reflow, then wafer to substrate bonding is achieved, but temperature-sensitive superconducting circuits are damaged

Engineering Contradiction:
Improvewafer-substrate bond strengthVSAvoidprocessing temperature
Core Design Contradiction:
StrengthVSTemperature

Solution Approach 1:

The patent changes the bonding process temperature from elevated reflow temperatures (>200°C) to room temperature or slightly elevated temperatures compatible with superconducting circuit integrity. The adhesive bonding chemistry is selected to provide sufficient bond strength at these lower temperatures, eliminating thermal damage to the Josephson junctions and other temperature-sensitive components.

Inventive Principle:
Principle #35Parameter changes

3Temperature

If filler material is added between wafer and substrate, then thermal conductivity is enhanced, but reflow process and alignment are impaired

Engineering Contradiction:
Improvethermal conductivityVSAvoidwafer-substrate alignment
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The patent extracts the filler material from the bonding interface, using a clear adhesive that allows direct visualization of the wafer and substrate alignment. This elimination of opaque filler material enables precise alignment to be achieved and maintained, while the adhesive itself provides the necessary thermal conduction path without interfering with the bonding process.

Inventive Principle:
Principle #2Taking out (Extraction)

4Reliability

If solder bumps are used for electrical connection, then electrical conductivity is achieved, but mechanical stability under vibration is poor

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidvibration tolerance
Core Design Contradiction:
ReliabilityVSForce

Solution Approach 1:

The patent replaces the mechanical solder bump structure with an adhesive-bonded flat contact interface. This substitution eliminates the mechanical weaknesses of solder bumps under vibration and thermal cycling, providing a more robust electrical connection that maintains stability under environmental stress while preserving electrical conductivity through the adhesive medium.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesive bonding technique ensures robust and reliable electrical connections over a broad temperature range, including cryogenic temperatures, with improved vibrational tolerance and the ability to maintain high-speed data transmission rates, while allowing for reworkability and increased package density.

Implementation Method 1

providing a liquid curable adhesive over the set of contacts of a first substrate; aligning the set of electrical contacts of the second substrate with the set of electrical contacts of the first substrate to form a liquid curable adhesive-filled gap therebetween; compressing the sets of electrical contacts

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

compressing the sets of electrical contacts of the first and second substrate to displace the liquid curable adhesive and provide electrical communication between the respective sets of electrical contacts

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

curing the liquid curable adhesive to form a solid matrix which maintains a relative compression between the respective sets of electrical contacts. Electrical conductivity between the respective sets of electrical contacts is preferably maintained over at least a range of temperatures

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS10373928B1Method for electrically interconnecting at least two substrates and multichip module
Publication Date: 2019.08.06 SEEQC INC
  • US10373928B1 patent drawing
  • US10373928B1 patent drawing
  • US10373928B1 patent drawing

AI summary

A method for electrically interconnecting two substrates, each having a corresponding set of preformed electrical contacts, the substrates comprising an electronic circuit, and the resulting module, is provided. A liquid curable adhesive is provided over the set of contacts of a first substrate, and the set of electrical contacts of the second substrate is aligned with the set of electrical contacts of the first substrate. The sets of electrical contacts of the first and second substrate are compressed to displace the liquid curable adhesive from the inter-contact region, and provide electrical communication between the respective sets of electrical contacts. The liquid curable adhesive is then cured to form a solid matrix which maintains a relative compression between the respective sets of electrical contacts. One embodiment of the module comprises a high-speed superconducting circuit which operates at cryogenic temperatures.