Adhesive Layer Surface Roughness Measurement for MEMS Bonding
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Solution Overview
Problem
In the manufacturing of joined bodies with microstructures, such as MEMS devices and liquid ejecting heads, uneven adhesive application and air bubbles can lead to bonding failures, resulting in separation or leakage issues.
Innovation Solution
A manufacturing method that involves forming an adhesive layer, adjusting its viscosity, and measuring the surface roughness of the adhesive layer before transcribing it onto the structures, ensuring the adhesive layer is smooth and evenly applied to prevent bonding failures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If adhesive is applied to a film and then transcribed to structures, then the adhesive can be transferred to the micro structures, but application unevenness occurs causing air bubbles and bonding failure
Solution Approach 1:
The patent applies preliminary action by measuring the surface roughness of the adhesive layer before transcribing it to the structures. This allows detection of application unevenness in advance, enabling corrective actions to be taken before the adhesive is transferred, thus preventing air bubbles and bonding failures in the final product
Solution Approach 2:
The patent implements feedback by using surface roughness measurement to monitor the quality of the adhesive layer. The measurement results provide feedback on application uniformity, allowing the process to be adjusted to maintain consistent adhesive quality and prevent bonding defects
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively suppresses bonding failures, improves joining reliability, and enhances manufacturing efficiency by ensuring accurate surface roughness measurement and adhesive layer thickness, reducing the risk of separation or leakage in the joined body.
Implementation Method 1
measuring surface roughness of the adhesive layer on the medium in a stage before the transcribing is performed
Data Source
AI summary
A manufacturing method of a joined body in which a plurality of structures are joined to each other, the method including forming of an adhesive layer on one face of a medium; adjusting of viscosity of the adhesive layer formed in the forming of the adhesive layer; transcribing the adhesive layer of which viscosity is adjusted in the adjusting of viscosity to the structure; and measuring of surface roughness of the adhesive layer on a transcribing film in a stage before the transcribing.