Adhesive Substrate with Curved Contact for Microchip Transfer

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Solution Overview

Problem

Existing methods for downsizing semiconductor chips, such as flip chip bonding and anisotropic conductive films, face challenges in efficiently picking up and transferring large amounts of fine chips and particles due to complex processes and high costs, particularly in preventing static electricity-induced failures and uneven particle distribution.

Innovation Solution

An adhesive substrate with a recessed and projected pattern on a support base member containing electroconductive particles and an insulating resin, where the adhesive layer is applied only on the upper surfaces of the projected portions with a curved surface, allowing for selective and rapid transfer of fine chips and particles while minimizing static electricity issues.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a flat-surface adhesive layer is used to pick up chips, then the contact area with chips is large, but it becomes difficult to transfer all chips completely to a different adhesive substrate and the process becomes complicated

Engineering Contradiction:
Improvecontact area of adhesive layerVSAvoidchip transfer completeness and speed
Core Design Contradiction:
Area of stationary objectVSProductivity

Solution Approach 1:

The adhesive layer is segmented into multiple independent adhesive regions corresponding to the recessed and projected pattern, where each projected portion forms a discrete adhesive contact point. This segmentation allows individual chip pickup and transfer without interference, solving the problem of incomplete transfer and process complexity while maintaining sufficient contact area through the distributed adhesive regions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The adhesive layer exhibits local quality variations through the recessed and projected pattern, with adhesive material concentrated on the projected portions that contact the chips. This creates localized adhesive zones with different properties (adhesive concentration, contact pressure) in different regions, enabling selective and complete chip transfer while simplifying the overall process.

Inventive Principle:
Principle #3Local quality

2Manufacturing precision

If chips are picked up one by one using conventional methods, then individual placement is possible, but it takes quite a long time for die bonding of large amounts of very small chips

Engineering Contradiction:
Improveindividual chip placement precisionVSAvoidchip transfer speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The adhesive layer is pre-configured with a recessed and projected pattern that corresponds to the chip arrangement before pickup. This preliminary configuration allows multiple chips to be picked up simultaneously in their correct positions, maintaining individual placement precision while dramatically increasing transfer speed by processing multiple chips in parallel rather than sequentially.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If pressure is reduced on one side of a porous plate to capture electroconductive particles, then particle transfer is achieved, but the number of steps increases and cost increases extremely

Engineering Contradiction:
Improveelectroconductive particle distribution regularityVSAvoidnumber of process steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The support base member with recessed and projected pattern serves multiple functions simultaneously: it provides the adhesive substrate, creates the particle pickup pattern through its geometry, and enables transfer without requiring external pressure control systems. The structure itself performs the particle capture and transfer function, eliminating the need for porous plates and pressure reduction steps, thereby reducing device complexity and cost while maintaining particle distribution regularity.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adhesive substrate enables efficient and rapid transfer of large amounts of fine chips and particles with reduced static electricity-related failures, facilitating the use in micro-LED transfer devices and anisotropic conductive substrate manufacturing by ensuring reliable adhesion and uniform particle distribution.

Implementation Method 1

an adhesive layer provided on the support base member... the adhesive layer is provided at least on upper surfaces of the projected portions

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

the support base member contains electroconductive particles and an insulating resin... reduced static electricity-related failures

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS10818618B2Adhesive substrate, transfer device having adhesive substrate, and method for producing adhesive substrate
Publication Date: 2020.10.27 SHIN ETSU CHEMICAL CO LTD
  • US10818618B2 patent drawing
  • US10818618B2 patent drawing
  • US10818618B2 patent drawing

AI summary

An adhesive substrate includes a support base member and an adhesive layer provided on the support base member. The support base member contains electroconductive particles and an insulating resin, and has a recessed and projected pattern with two or more projected portions on one surface or both surfaces of the support base member. The adhesive layer is provided at least on upper surfaces of the projected portions in the recessed and projected pattern of the support base member. The adhesive layer on the upper surfaces of the projected portions has an upper surface with a curved surface. Thus, the present invention provides an adhesive substrate capable of selectively picking up and quickly transferring large amounts of fine chips and particles, a method for producing the adhesive substrate, and a transfer device.