Adjustable Aperture Dispenser Shield for Drop Placement
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Solution Overview
Problem
Existing fluid dispenser systems suffer from 'bowing effects' and 'residual layer thickness (RLT) banding effects' due to edge drops having higher velocity and size variations, leading to non-uniform drop placement and RLT uniformity issues, which current shielding techniques fail to adequately address.
Innovation Solution
A dispenser shield with an adjustable aperture is implemented to intercept and capture edge drops, allowing only uniformly sized drops to impact the substrate, while the captured fluid is removed via a vacuum port system, ensuring improved drop placement and RLT uniformity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fixed shield structure is used to block edge drops, then drop placement uniformity improves, but the ability to adapt to different pattern sizes and shapes is reduced
Solution Approach 1:
The shield structure incorporates movable segments that can be dynamically adjusted in position and configuration. The shield segments can be repositioned along the dispenser trajectory to accommodate different pattern sizes, shapes, and edge definitions, allowing the same shield structure to adapt to various dispensing requirements while maintaining its edge drop blocking function
Solution Approach 2:
The shield is divided into multiple independent segments rather than a single fixed structure. Each segment can be individually positioned and adjusted, allowing flexible configuration to match different pattern geometries. This segmentation enables the shield to adapt to various pattern sizes and shapes while maintaining effective edge drop blocking where needed
2Manufacturing precision
If shielding is applied to all edges, then RLT uniformity improves, but device complexity increases
Solution Approach 1:
The shield structure applies blocking functionality only where edge drops occur, rather than uniformly across the entire dispenser. The movable segments can be positioned to provide localized shielding at specific edges or regions where drop uniformity issues exist, leaving other areas open for normal dispensing, thus achieving RLT uniformity improvement without unnecessary complexity
3Ease of manufacture
If the shield aperture is fixed, then manufacturing simplicity is maintained, but the ability to optimize for different field areas is reduced
Solution Approach 1:
The shield aperture configuration is made dynamic through movable segments that can be repositioned to create different effective aperture sizes and shapes. This allows the same manufactured shield structure to be optimized for different field areas by adjusting segment positions rather than manufacturing different fixed aperture shields, maintaining manufacturing simplicity while achieving adaptability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively minimizes 'bowing effects' and enhances RLT uniformity by preventing edge drops from hitting the substrate, resulting in improved drop placement and residual layer thickness consistency.
Implementation Method 1
the captured fluid is removed via a vacuum port system
Data Source
AI summary
A fluid dispenser apparatus includes a fluid dispenser having plurality of nozzles aligned in a first longitudinal direction. A dispenser shield is positioned relative to the plurality of nozzles, the dispenser shield configured to form an aperture aligned in the first longitudinal direction with the plurality of nozzles. The plurality of nozzles are configured to dispense fluid towards a substrate. The dispenser shield is further positioned such that fluid dispensed from a first subset of the plurality of nozzles passes through the aperture while fluid dispensed from a second subset of the plurality nozzles is captured by the dispenser shield.