Adjustable Aperture for Spectral Sub-beam Selection

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Solution Overview

Problem

Existing spectroscopic apparatus in Transmission Charged-Particle Microscopes, such as EELS modules, are limited in versatility and accuracy, particularly in adjusting apertures for selecting spectral components, leading to suboptimal signal-to-noise ratios and difficulties in simultaneous recording of high-intensity and low-intensity spectral components.

Innovation Solution

An adjustable aperture device with independently positionable and adjustable edges allows for precise selection of spectral sub-beams, blocking stray radiation, admitting specific subsets, or excluding high-intensity portions, enabling improved signal-to-noise ratios and allowing for simultaneous recording of spectral components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a fixed aperture is used in existing spectroscopic apparatus, then the device structure is simple, but the versatility and accuracy of spectral component selection are limited

Engineering Contradiction:
Improvespectral component selection capabilityVSAvoidaperture device structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies the dynamics principle by making the aperture edges independently positionable along the dispersion direction. This allows the aperture to dynamically adapt to different spectral components that need to be measured, enabling flexible selection of spectral ranges and optimization of signal-to-noise ratios for various measurement conditions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent applies the segmentation principle by dividing the aperture into multiple independently controllable edges. Each edge can be positioned separately, allowing precise definition of the aperture boundaries. This segmentation enables flexible configuration of the aperture shape and position to match different spectral component requirements.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If a fixed aperture is used, then the device is easy to operate, but the signal-to-noise ratio and measurement accuracy are suboptimal

Engineering Contradiction:
Improvespectroscopic accuracyVSAvoidaperture adjustment complexity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The patent applies the parameter changes principle by enabling independent adjustment of aperture edge positions along the dispersion direction. This allows optimization of the aperture parameters (position and width) to match the specific spectral components being measured, thereby improving signal-to-noise ratio and measurement accuracy for different spectroscopic conditions.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If a fixed aperture is used, then the device structure is simple, but simultaneous recording of high-intensity and low-intensity spectral components is difficult

Engineering Contradiction:
Improvesimultaneous spectral component recording capabilityVSAvoidaperture control system
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies the dynamics principle by making the aperture edges independently positionable, allowing dynamic adjustment of the aperture to simultaneously capture both high-intensity and low-intensity spectral components. This enables flexible configuration of the aperture to match the spatial distribution of different spectral intensities along the dispersion direction.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adjustable aperture device enhances spectroscopic accuracy by reducing measurement noise, optimizing detector sensitivity, and enabling separate measurement of spectral components, facilitating deconvolution and improved data processing.

Implementation Method 1

a dispersing device, for dispersing said flux into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis

Methodology Applied
Scientific EffectEnergy dispersion: Dispersion (of waves)

Implementation Method 2

an adjustable aperture device for defining an aperture in a path of said array, so as to select a subset of said array to be admitted to the detector

Methodology Applied
Scientific EffectSpatial filtering: Spatial Filter

Data Source

PatentUS9991087B2Spectroscopy in a transmission charged-particle microscope
Publication Date: 2018.06.05 FEI CO
  • US9991087B2 patent drawing
  • US9991087B2 patent drawing
  • US9991087B2 patent drawing

AI summary

An imaging system for directing a flux of charged particles transmitted through a specimen onto a spectroscopic apparatus, wherein the flux is dispersed by a dispersing device into an energy-resolved array of spectral sub-beams propagating substantially parallel to a propagation axis. An adjustable aperture device defines an aperture in a path of the array so as to select a subset of the array to be admitted to a detector, which aperture is delimited in a dispersion direction perpendicular to the propagation axis to allow independent adjustment of both of: a width of the aperture parallel to the dispersion direction; and a position of a center of the aperture relative to the propagation axis.