Adjustable Coaxial Filter Device for Plasma Processing Impedance Control
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Solution Overview
Problem
In plasma processing apparatuses, existing filter devices struggle to effectively control the impedance of high-frequency powers with different frequencies, which is necessary for precise temperature distribution control of substrates during manufacturing processes.
Innovation Solution
A filter device comprising coaxially arranged coils, adjustable wirings, and capacitors connected to ground, forming a distributed constant line with adjustable impedance frequency characteristics, allowing for precise impedance control at desired frequencies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a filter device is designed to cut off or attenuate multiple high frequency powers with different frequencies, then the ability to control impedance at desired frequencies is improved, but the device complexity increases due to the need for multiple coils and adjustable wirings
Solution Approach 1:
The filter device uses a single integrated structure with multiple coils and adjustable wirings that can handle multiple high frequency powers with different frequencies simultaneously. This multi-functional design allows one device to perform what would traditionally require multiple separate filters, thereby improving adaptability while managing complexity through consolidation.
Solution Approach 2:
The wirings are designed to be adjustable in length within the housing, allowing dynamic modification of the filter characteristics. This adjustability enables the filter device to adapt to different frequency requirements by changing the wiring configuration, providing impedance control flexibility without requiring multiple fixed-frequency filter devices.
2Manufacturing precision
If the wiring length is made adjustable in the housing, then the impedance control precision at desired frequencies is improved, but the ease of operation decreases due to the need for adjustment mechanisms
Solution Approach 1:
The wirings are pre-configured with adjustable lengths within the housing during manufacturing, allowing impedance control to be optimized for specific frequency requirements before deployment. This preliminary configuration reduces the need for complex real-time adjustments during operation, as the system can be pre-tuned to match expected operating conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables precise control of impedance at desired frequencies, effectively filtering high-frequency powers and maintaining optimal substrate temperature distribution, enhancing the performance of plasma processing apparatuses.
Implementation Method 1
Each of the filters includes a coil and a capacitor as described in Japanese Patent Application Publication No. 2014-99585. The filters are provided outside the chamber.
Implementation Method 2
each of the wirings at least partially extends into the housing and has a length that is adjustable in the housing
Data Source
AI summary
There is provided a filter device. In the filter device, a plurality of coils are arranged coaxially. Each of a plurality of wirings is electrically connected to one end of each of the coils. Each of a plurality of capacitors is connected between the other end of each of the coils and the ground. A housing is electrically grounded and configured to accommodate therein the coils. Further, each of the wirings at least partially extends into the housing and has a length that is adjustable in the housing.