Adjustable Extraction Grids for Ion Beam Profile Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Ion sources and ion engines are structurally limited in variability of ion beam profiles, energy distribution, and intensity, making it difficult to adapt to different applications and operating conditions, particularly in material processing and space thrust generation, where flexible beam profiles and optimal operating parameters are essential.
Innovation Solution
A device with an adjustable extraction grid system comprising electrically isolated extraction grids that can be moved and tilted to change the ion beam profile, allowing for customizable ion beam generation through a grid controller that adjusts position parameters such as displacement, tilt, and rotation, enabling flexible application and extended service life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a rigid extraction grid system is integrated into the ion source to define the beam profile, then the spatial profile of the extracted ion beam is determined, but the variability of the beam profile becomes limited and cannot be easily altered by operating parameters
Solution Approach 1:
The patent applies the dynamics principle by making the extraction grid system adjustable rather than rigid. The extraction grids can be moved relative to each other along the beam axis and tilted to change angles, allowing the beam profile to be dynamically adapted to different applications while maintaining a structured grid architecture
Solution Approach 2:
The extraction grid system is divided into multiple independently controllable extraction grids. Each grid can be positioned and angled separately, allowing independent adjustment of beam parameters. This segmentation enables flexible beam profile control without requiring complete redesign of the entire grid system
2Adaptability or versatility
If the extraction grid system is rigidly integrated to maintain stable operation, then reliability is improved, but the ability to adapt to different applications and operating conditions deteriorates
Solution Approach 1:
The system maintains reliability through stable electrical connections and controlled movement mechanisms, while simultaneously enabling adaptation to different applications by allowing adjustable grid positions and angles. The dynamics principle resolves the contradiction by providing both stability in operation and flexibility in configuration
3Adaptability or versatility
If operating parameters are adjusted to change beam profile, then beam intensity or energy may change, but the basic shape of the spatial profile remains unchanged
Solution Approach 1:
By making the extraction grids physically adjustable in position and angle, the system directly controls beam profile shape through mechanical configuration rather than relying solely on electrical parameter adjustments. This dynamic structural control simplifies operation for profile shaping while maintaining ease of electrical parameter tuning for intensity and energy control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides greater flexibility in ion beam generation, enabling conformal coating of complex surfaces, optimizing layer properties, and extending the service life of ion engines by allowing optimal adjustment of the extraction lattice system to different operating modes, reducing wear and tear, and improving engine efficiency.
Implementation Method 1
the ions are extracted from a plasma using an extraction grid system. This extraction grid system acts as ion optics and is used to define the beam profile of the extracted ion beam
Implementation Method 2
The ions are incorporated into the target material and may form a chemical compound there. This effect is called (reactive) ion implantation. This occurs primarily at high energies.
Implementation Method 3
The ions condense on the bombarded substrate and form a layer. This is called ion beam deposition. This occurs primarily at low energies.
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a device 10 for generating ion beams with adjustable ion beam profiles, comprising at least one plasma vessel 20, an ion optics 25, and a grating control 28. The ion optics 25 comprises at least two electrically isolated extraction gratings (251) and (252), each of which may in turn consist of several electrically connected subgrids. The grating control 28 is configured to change the relative positions of the extraction gratings (251, 252) and the subgrids, thereby selectively adjusting the ion beam profile.