Adjustable Multi-Part Fasteners for Microelectronic Contactor Planarity
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Solution Overview
Problem
Modern microelectronic contactor assemblies face challenges in achieving reliable connections to semiconductor wafers due to the shrinking size and pitch of semiconductor dies and increasing number of electrical contacts, requiring precise alignment and planarity of microelectronic contactors without mechanical adjustments.
Innovation Solution
The use of adjustable multi-part fasteners and inserts anchored in the probe head substrate, which provide compression and maintain planarity through differential screw mechanisms, ensuring precise alignment and reliable contact with semiconductor wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of electrical contacts between probe head and wafer is increased to achieve one touchdown full wafer test, then the coverage and productivity are improved, but the precision alignment becomes more difficult and the contactor planarity is more challenging to maintain
Solution Approach 1:
The probe head is divided into multiple contactor units, each with its own adjustable fastening mechanism. This segmentation allows independent adjustment of each contactor group, enabling precise alignment across a large number of contacts without requiring perfect uniformity in the entire array.
Solution Approach 2:
The patent employs adjustable multi-part fasteners with differential screw mechanisms that allow dynamic adjustment of contactor positions during assembly. This dynamic adjustability enables compensation for manufacturing tolerances and substrate warpage, achieving precise alignment even as the number of contacts increases.
2Productivity
If the number of electrical contacts is increased, then the testing capability is improved, but the difficulty of maintaining contactor planarity increases
Solution Approach 1:
The fastening system is divided into multiple independent adjustable fasteners distributed across the probe head substrate. Each fastener controls the planarity of its local contactor region, allowing localized compensation for substrate warpage and manufacturing variations across the entire large contactor array.
Solution Approach 2:
The adjustable fasteners with differential screw mechanisms provide a feedback control system where the position and planarity of contactors can be monitored and adjusted during assembly. This enables real-time compensation for deviations from ideal planarity as the number of contacts increases.
3Manufacturing precision
If mechanical adjustments are used to achieve precise alignment, then the alignment precision is improved, but the device complexity and number of components increase
Solution Approach 1:
The adjustable multi-part fasteners serve multiple functions simultaneously: they provide mechanical attachment of contactors to the substrate, enable precise alignment through differential adjustment, and maintain contactor planarity. This multi-functionality reduces the need for separate alignment components and tools.
Solution Approach 2:
The patent merges the attachment mechanism and alignment mechanism into a single integrated adjustable fastener assembly. The differential screw mechanism combines the functions of securing the contactor and adjusting its position, reducing the total number of components compared to separate attachment and alignment systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables reliable and precise connections to semiconductor wafers by maintaining planarity and alignment of microelectronic contactors, improving the efficiency and accuracy of semiconductor testing processes.
Implementation Method 1
a compressible electrical interconnect (often in the form of an electrical 'interposer')
Implementation Method 2
adjustable multi-part fasteners and inserts anchored in the probe head substrate, which provide compression and maintain planarity through differential screw mechanisms
Data Source
AI summary
A plurality of inserts are anchored in holes or recesses in a probe head. Shafts are coupled to the inserts, and adjustable multi-part fasteners are attached to the shafts and to a stiffener. The multi-part fasteners are operated to move the shafts and couple the probe head, the stiffener, and other components of a microelectronic contactor assembly. In some embodiments, the inserts may be anchored in the probe head using an adhesive. In some embodiments, the probe head may comprise more than one major substrate, and the inserts may be anchored in either of the substrates.