Adjustable Flow Valves for Multi-Station Dry Process Gas Balancing
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Solution Overview
Problem
Dry process tools with multiple processing stations face challenges in maintaining consistent gas flow across stations due to the sum of tolerances in gas flow path components, leading to differences outside desired ranges, which existing methods like component swapping or heated gas lines are costly and inefficient.
Innovation Solution
Incorporating adjustable flow valves and mass flow controllers in each gas flow path to allow for precise adjustment and calibration of gas flows, enabling independent tuning of each station and compensating for hardware disparities, thereby maintaining consistent gas flow across multiple stations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If component swapping or heated gas lines are used to maintain consistent gas flow, then gas flow consistency is improved, but cost and operational efficiency deteriorate
Solution Approach 1:
The patent applies parameter changes by using adjustable flow valves that allow dynamic modification of flow coefficients (Cv values) in each gas flow path. This enables precise tuning of gas flow rates to compensate for tolerance variations in components, achieving consistent gas flow across multiple processing stations without requiring expensive component swapping or heated gas lines. The flow valves can be adjusted to specific Cv values to optimize flow distribution.
2Ease of manufacture
If fixed orifices are used in gas flow paths, then manufacturing simplicity is improved, but adaptability to flow adjustments deteriorates
Solution Approach 1:
The patent implements dynamics by replacing fixed orifices with adjustable flow valves in each gas flow path. These valves can dynamically change their flow characteristics through adjustment of the valve opening or replacement with valves having different Cv values. This provides the ability to adapt gas flow rates to match process requirements and compensate for component variations, while maintaining a relatively simple manifold structure.
3Manufacturing precision
If manual component swapping is performed to balance gas flows, then gas flow consistency is improved, but time consumption and productivity deteriorate
Solution Approach 1:
The patent applies preliminary action by pre-calculating and pre-selecting flow valves with specific Cv values for each gas flow path based on expected tolerance variations and flow requirements. During system assembly or maintenance, the appropriate pre-selected valves can be quickly installed without requiring time-consuming manual adjustment or swapping operations. This reduces downtime while maintaining gas flow consistency.
Data Source
AI summary
A system for a dry process tool comprises one or more processing chambers, two or more processing stations being positioned within the one or more processing chambers; and a first gas source. A common manifold is coupled to the first gas source via at least a first mass flow controller. The common manifold fluidly couples the first gas source to each processing station of the two or more processing stations via a corresponding flow path. Each corresponding flow path comprises an adjustable flow valve.