Adjustable Fluid Nozzle for CMP Carrier Head Gap Cleaning

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Solution Overview

Problem

Existing nozzle designs for chemical mechanical polishing (CMP) systems are limited in their ability to effectively clean narrow gaps between the hydrophobic membrane and the retaining ring of the carrier head, leading to residue accumulation and potential substrate defects due to their fixed configurations and inability to target specific areas.

Innovation Solution

An adjustable fluid nozzle with a threaded region, central symmetric axis, and port configuration that allows for orientation adjustments to direct a fluid stream precisely into narrow gaps, enabling effective cleaning of the carrier head while accommodating various carrier head and sprayer combinations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a fixed configuration nozzle is used, then the nozzle structure is simple, but it cannot effectively clean narrow gaps between the membrane and retaining ring

Engineering Contradiction:

Improvecleaning precisionVSAvoidnozzle structure complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The nozzle incorporates an adjustable orientation mechanism that allows the port axis to be angled relative to the central symmetric axis, enabling dynamic adjustment of the spray direction to effectively clean narrow gaps between the membrane and retaining ring while maintaining a relatively simple nozzle structure

Inventive Principle:

Principle #15Dynamics

2Measurement precision

If a fixed orientation nozzle is used, then the nozzle design is simple, but it cannot target specific areas for rinsing and cleaning

Engineering Contradiction:

Improvetargeting precisionVSAvoidnozzle configuration complexity

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The nozzle design includes an adjustable port orientation where the port axis can be positioned at an angle to the central symmetric axis, allowing precise targeting of specific areas such as narrow gaps and edges during substrate processing while keeping the overall nozzle configuration relatively simple

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The nozzle creates a localized laminar fluid stream through its specific port geometry and orientation, concentrating the cleaning action on specific target areas like the gap between the membrane and retaining ring, rather than distributing flow uniformly in all directions

Inventive Principle:

Principle #3Local quality

3Adaptability or versatility

If a standard nozzle design is used, then compatibility with different carrier heads is limited, but the nozzle can be easily manufactured

Engineering Contradiction:

Improvecompatibility with carrier headsVSAvoidnozzle design complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The adjustable orientation capability of the nozzle allows it to adapt to multiple carrier head and sprayer combinations, making a single nozzle design universally compatible with different configurations rather than requiring specialized nozzles for each carrier head type

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Reliability

If the nozzle cannot adjust orientation, then the structure is simple, but residue accumulates in gaps affecting substrate quality

Engineering Contradiction:

Improvesubstrate qualityVSAvoidnozzle structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The adjustable port orientation allows the nozzle to direct a laminar fluid stream into narrow gaps between the membrane and retaining ring, effectively removing particles and residues that would otherwise accumulate and compromise substrate quality, while maintaining a relatively simple nozzle structure

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The adjustable nozzle ensures a steady, laminar fluid stream can target and clean the gap between the membrane and retaining ring, reducing residue accumulation and enhancing the efficiency of the CMP process by allowing for multiple carrier head and sprayer combinations without the need for specific alignments or heights.

Implementation Method 1

One embodiment encompasses a fluid nozzle that enables a laminar stream to effectively penetrate and clean the carrier head

Methodology Applied

Scientific EffectLaminar flow: Laminar Flow

Data Source

PatentUS20240326198A1Compact adjustable spray nozzle to precisely target areas for rinsing, removing particles, and improve hardware cleanliness

Publication Date: 2024.10.03 APPLIED MATERIALS INC

AI summary

Embodiments of the present disclosure generally relate fluid nozzles used in semiconductor manufacturing. The fluid nozzle includes a nozzle body disposed between an inlet face and an outlet face. The body includes a threaded region, a central symmetric axis, and a port. The threaded region is disposed between the inlet face and the outlet face. The central symmetric axis extends along a port axis and through the nozzle body. The port extends along a port axis and through the nozzle body. The port axis extends through the nozzle body between the inlet face and the outlet face. A first angle is formed between the port axis and the central symmetric axis. A port outlet face is perpendicular to the port axis, adjacent to the outlet face, and at a second angle to the outlet face.