Adjustable Gas Distribution Assembly for Uniform Deposition
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Solution Overview
Problem
Existing gas-phase reactors require time-consuming and costly processes to adjust the gap between the shower plate and gas channel, affecting gas conductance and film deposition uniformity, and existing shower plates need replacement for different conditions, impacting efficiency and cost.
Innovation Solution
A gas distribution assembly with adjustable gap devices that allow manual or remote adjustment of the gas channel relative to the shower plate, enabling precise control of the gap size and tilt, and includes sealing structures to maintain vacuum and RF propagation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the gap between shower plate and gas channel is changed to adjust gas conductance, then film deposition uniformity is improved, but equipment efficiency deteriorates due to time-consuming replacement steps
Solution Approach 1:
The gas channel is made adjustable through mechanical devices (screws, bolts, or motorized actuators) that enable dynamic modification of the gap between the shower plate and gas channel. This allows the system to adapt to different deposition requirements without physical replacement, resolving the contradiction between achieving uniform film deposition and maintaining equipment efficiency.
Solution Approach 2:
A single gas channel assembly is designed to perform multiple functions: it can be adjusted to different gap positions and tilted to various angles to accommodate different deposition conditions. This multi-functionality eliminates the need for multiple specialized components, thereby improving productivity while maintaining manufacturing precision.
2Ease of operation
If shower plate replacement is performed to adjust gas distribution, then gas flow control is improved, but time and cost increase due to disassembly and reassembly steps
Solution Approach 1:
The gas channel incorporates adjustable gap devices with screws, bolts, or motorized actuators that enable continuous modification of the gap size and tilt angle. This dynamic adjustment capability allows operators to optimize gas flow distribution without time-consuming replacement procedures, directly addressing the contradiction between ease of operation and time loss.
3Adaptability or versatility
If multiple shower plates are used for different conditions, then adaptability is improved, but device complexity and cost increase
Solution Approach 1:
A single universal gas channel assembly is designed with adjustable gap devices and tilt mechanisms that enable it to adapt to various deposition conditions. This eliminates the need for multiple specialized shower plates, reducing device complexity and cost while maintaining high adaptability for different gas distribution requirements.
Solution Approach 2:
The gas channel's gap and tilt are made dynamically adjustable, allowing one component to replace multiple fixed configurations. This dynamic capability provides the same adaptability as having multiple shower plates but with significantly reduced complexity and cost.
Data Source
AI summary
A gas distribution assembly and methods for adjusting the gas flow through a gas supply unit into a reaction chamber are disclosed. The gas distribution assembly and methods can be used to increase or decrease gas flow uniformly through the gas supply unit. The gas distribution assembly and methods can also be used to increase gas flow into one area of the reaction chamber, while decreasing gas flow into another area.