Adjustable Gas Supply Pipe for Evaporation Apparatus

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Solution Overview

Problem

Existing evaporation apparatuses for depositing materials on flexible substrates often result in irregularities in the optical appearance and integrity of the coating, which are not acceptable for applications like the packaging industry, despite efforts to improve productivity and quality.

Innovation Solution

An evaporation apparatus with a set of aligned evaporation crucibles and a gas supply pipe with adjustable outlets, allowing for precise control of the gas supply position and direction to generate a gradient layer by reacting evaporated material with gas, thereby adjusting the composition and properties of the deposited layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the number of material sources is increased to improve productivity, then the production speed increases, but the complexity of the apparatus increases

Engineering Contradiction:
Improveproduction speedVSAvoidapparatus complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The gas supply pipe is made adjustable and rotatable, allowing dynamic repositioning of the gas supply outlets to optimize their position relative to the evaporation crucibles. This dynamic capability enables a single gas supply pipe to effectively service multiple crucibles at different positions, improving productivity without proportionally increasing apparatus complexity

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

A single gas supply pipe with multiple adjustable outlets serves multiple evaporation crucibles, making the gas supply system multi-functional. This universal approach allows one gas supply component to perform the function that would otherwise require multiple fixed gas supply pipes, thereby improving productivity while limiting complexity increase

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If multiple gas supply pipes are used to improve layer uniformity, then the manufacturing precision increases, but the device complexity increases

Engineering Contradiction:
Improvelayer uniformityVSAvoidapparatus complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The gas supply pipe is segmented into multiple outlets distributed along its length, with each outlet capable of independent positioning. This segmentation allows precise local control of gas supply to different regions of the substrate, improving layer uniformity while using a single integrated pipe structure rather than multiple separate pipes

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The gas supply pipe can be rotated and repositioned to dynamically adjust the spatial distribution of gas outlets relative to the evaporation crucibles and substrate. This dynamic adjustment capability enables optimization of gas flow patterns for uniform layer deposition without requiring multiple fixed gas supply pipes

Inventive Principle:
Principle #15Dynamics

3Device complexity

If the gas supply position is fixed, then the device complexity is reduced, but the ability to control layer composition and properties is limited

Engineering Contradiction:
Improveapparatus simplicityVSAvoidlayer composition control
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The gas supply pipe is designed with rotational and positional adjustability, transforming it from a fixed to a dynamic component. This allows the same simple pipe structure to adapt to different crucible positions and gas flow requirements, enabling control of layer composition and properties without significantly increasing apparatus complexity

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The position and orientation parameters of the gas supply pipe can be changed to optimize gas flow patterns and reaction conditions. By adjusting these parameters, different layer compositions and properties can be achieved with a single adjustable pipe rather than requiring multiple fixed pipes for each configuration

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables the production of high-quality gradient layers with controlled barrier and optical properties, improving durability and appearance, suitable for packaging applications, by allowing for precise adjustment of the layer composition and thickness.

Implementation Method 1

a first set of evaporation crucibles (111-117) aligned in a first line (120) along a first direction for generating a cloud of evaporated material to be deposited on the substrate

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

providing a gas supply directed into the cloud of evaporated material through a plurality of outlets (133) of a single gas supply pipe (130) for generating the second composition

Methodology Applied
Scientific EffectChemical reaction: Chemical Bonding

Data Source

PatentEP3491161B1Deposition apparatus
Publication Date: 2023.06.07 APPLIED MATERIALS INC
  • EP3491161B1 patent drawingFigure 1~3
  • EP3491161B1 patent drawingFigure 4A~5B
  • EP3491161B1 patent drawingFigure 6~8

AI summary

An evaporation apparatus (100) for depositing material on a flexible substrate (160) supported by a processing drum (170) is provided. The evaporation apparatus includes: a first set (110) of evaporation crucibles aligned in a first line (120) along a first direction for generating a cloud (151) of evaporated material to be deposited on the flexible substrate (160); and a gas supply pipe (130) extending in the first direction and being arranged between an evaporation crucible of the first set (110) of evaporation crucibles and the processing drum (170), wherein the gas supply pipe (130) includes a plurality of outlets (133) for providing a gas supply directed into the cloud of evaporated material, and wherein a position of the plurality of outlets is adjustable for changing a position of the gas supply directed into the cloud of evaporated material.