Adjustable Glass Pallet Structure for Vertical Sputtering Transport
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Solution Overview
Problem
Conventional sputtering systems lack effective solutions for handling large area glass substrates, particularly thicker and heavier glass, or multiple glass substrates of varying sizes and shapes, which can lead to defects and thermal inconsistencies during processing.
Innovation Solution
The development of pallets with adjustable grid arrays that allow for the vertical orientation of glass substrates, providing flexible support and thermal matching to maintain uniform thermal expansion and contraction rates, and incorporating features like magnetic levitation for transportation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If glass substrates are processed in horizontal orientation using conventional roller support, then the processing equipment is simple and easy to operate, but thermal inconsistencies and sagging defects occur during sputtering
Solution Approach 1:
The patent inverts the conventional horizontal processing orientation to vertical orientation. The pallet holds glass substrates vertically during sputtering, which eliminates sagging defects and improves thermal consistency. This inversion of the processing orientation directly resolves the quality issues while accepting increased structural complexity in the pallet design.
Solution Approach 2:
The pallet incorporates adjustable support elements that can dynamically adapt to different glass substrate sizes and thicknesses. The support structure includes adjustable arms and positioning mechanisms that can be reconfigured for various substrate dimensions, allowing the system to maintain reliability across different processing scenarios while managing the complexity through programmable adjustment.
2Adaptability or versatility
If pallets are designed to accommodate multiple glass substrates of varying sizes and shapes, then versatility is improved, but device complexity increases
Solution Approach 1:
The pallet is designed as a universal platform that can accommodate multiple glass substrates of varying sizes, shapes, and thicknesses. The adjustable grid array and reconfigurable support structures enable a single pallet design to serve multiple substrate configurations, improving versatility while distributing the complexity across modular components that can be independently adjusted.
Solution Approach 2:
The pallet structure is segmented into multiple independent support elements and adjustable components rather than a monolithic structure. This segmentation allows each element to be independently positioned and configured for different substrate requirements, enabling versatility while managing complexity through modular, reconfigurable units rather than a complex integrated system.
3Manufacturing precision
If thicker and heavier glass substrates are processed, then product quality improves, but handling and thermal management become more difficult
Solution Approach 1:
The patent replaces conventional mechanical roller support with a vertical pallet-based mechanical suspension system. This substitution enables better control of thicker and heavier glass substrates by distributing support forces through multiple attachment points and utilizing vertical orientation to reduce gravitational sagging, thereby improving coating uniformity while managing the handling challenges of heavy substrates through enhanced mechanical control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and defect-free coating of large area glass substrates by preventing particulate deposition and maintaining uniform thermal profiles, accommodating various sizes and shapes, and reducing sagging issues associated with horizontal orientation.
Implementation Method 1
hold a plurality of glass substrates... in a substantially vertical orientation during transport
Implementation Method 2
The pallet may be transported through a sputter system using mechanical means, and optionally magnetic levitation
Implementation Method 3
pallets are configured to carry and/or absorb the heat load in the sputter apparatus so that their thermal profile approximates that of the glass substrate(s) which they carry
Implementation Method 4
differences in thermal expansion and contraction rates, as well as the thermal profile on the glass substrates is substantially uniform
Implementation Method 5
Enables efficient and defect-free coating of large area glass substrates by preventing particulate deposition
Data Source
Figure 1A~1B
Figure 2
Figure 3
AI summary
Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.