Adjustable Gripper Hand for Automated Semiconductor Material Transport
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Solution Overview
Problem
In semiconductor manufacturing lines, there is a need to transport various items such as substrates, chips, tapes, and boxes, which requires improvements in existing equipment to automate the handling and transport of these items without manual lifting.
Innovation Solution
A gripping device connected to a vehicle, featuring a base unit that moves up and down and a hand unit with adjustable spacing, motors, a conversion module for linear motion, and grippers, allowing for secure or release of items. This device is integrated into a transport apparatus that includes multiple vehicles capable of handling different specifications of items.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If existing substrate transport systems are used for transporting various items like boxes and tapes, then the transportation capability is expanded, but the equipment cannot automatically handle items of different specifications without manual intervention
Solution Approach 1:
The gripping device employs dynamically adjustable components including a movable base unit that can shift position and hand units with variable spacing between grippers. This dynamic configuration allows the same transport system to adapt to different item specifications (substrates, boxes, tapes) automatically, eliminating the need for manual reconfiguration and enabling versatile handling of various items.
Solution Approach 2:
The system changes operational parameters by adjusting the spacing between grippers in the hand unit and the position of the base unit based on the detected item type and specifications. Sensors detect item characteristics and automatically modify gripping parameters such as gripper distance and base unit position, enabling automated adaptation to different items without manual intervention.
2Adaptability or versatility
If the hand unit has fixed spacing between grippers, then the structure is simple, but it cannot accommodate items of different sizes and specifications
Solution Approach 1:
The hand unit incorporates movable components that allow dynamic adjustment of gripper spacing. The hand units can move relative to each other along the transport vehicle, enabling the system to accommodate different item widths and specifications. This dynamic structure adds complexity but enables versatile handling of various item sizes without requiring multiple dedicated devices.
Solution Approach 2:
The hand unit is designed as a universal gripping mechanism that can handle multiple types of items (substrates, boxes, tapes) by adjusting its configuration. Rather than creating separate specialized grippers for each item type, the universal hand unit with adjustable spacing serves multiple functions, reducing overall system complexity while maintaining adaptability.
3Productivity
If manual lifting is used for loading items into transport vehicles, then equipment complexity is reduced, but operator safety and efficiency are compromised
Solution Approach 1:
The gripping device performs self-service by automatically detecting items, adjusting its configuration, and securing loads without manual intervention. The sensors automatically identify item specifications and trigger appropriate gripping actions, eliminating the need for operators to manually lift and load items. This automation improves productivity while the integrated design keeps the added complexity manageable.
Solution Approach 2:
The system replaces manual mechanical lifting operations with an automated gripping mechanism driven by motors and controlled by sensors. Instead of operators physically handling items, the mechanical system uses motorized hand units to detect, grip, and transport items automatically, improving efficiency and safety while introducing controlled complexity through automation components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the automated transportation of various items within semiconductor manufacturing plants using existing substrate transport systems, eliminating the need for manual lifting and improving efficiency and safety.
Implementation Method 1
a conversion module converting the rotational motion of the motors into linear motion
Data Source
AI summary
A gripping device connected to a vehicle for transporting items to be transported in a semiconductor manufacturing plant, includes: a base unit provided on the vehicle to be movable up and down; and a hand unit provided on the base unit and having an adjustable spacing to either secure or release the items, wherein the hand unit includes: motors; a conversion module converting the rotational motion of the motors into linear motion; and grippers connected to the conversion module, with their spacing adjusted in conjunction with the conversion module.