Adjustable Hard Stop Valve for Substrate Processing Uniformity
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Solution Overview
Problem
Variability in gas flow and chamber pressures across substrate processing chambers leads to inconsistencies in substrate processing, affecting the uniformity and repeatability of fabrication processes.
Innovation Solution
The implementation of adjustable valves with hard stops in substrate processing chambers allows for precise control of gas flow rates and chamber pressures by limiting the fully open position of the valve, enabling matching of desired flow rates and pressures across chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If standard valves are used in substrate processing chambers, then the chambers can process substrates in parallel to enhance throughput, but variability in gas flow and chamber pressure exists from one chamber to another
Solution Approach 1:
The patent applies dynamics by making the valve stop position adjustable rather than fixed. The hard stop can be repositioned along the valve stem to different locations, allowing the valve opening degree to be dynamically adjusted. This enables each chamber's valve to be tuned to compensate for chamber-specific variations, achieving uniform gas flow and pressure across multiple chambers while maintaining parallel processing capability
Solution Approach 2:
The patent changes the parameter of valve opening degree by adjusting the hard stop position. By modifying this geometric parameter, the gas flow rate and chamber pressure can be precisely controlled for each individual chamber. This parameter adjustment allows chambers to be calibrated to achieve consistent processing conditions despite manufacturing tolerances and installation variations
2Quantity of substance
If the valve is allowed to open fully without restriction, then maximum gas flow is achieved, but the flow rate cannot be precisely controlled to match desired values across chambers
Solution Approach 1:
The patent implements feedback by measuring the actual gas flow rate or chamber pressure in each substrate processing chamber and using this information to adjust the hard stop position on the valve. This closed-loop approach allows operators to iteratively tune the valve opening degree until the desired flow rate or pressure is achieved, ensuring consistent processing conditions across all chambers
Solution Approach 2:
The patent applies preliminary action by pre-adjusting the hard stop position on each valve before operation. This preliminary calibration allows each chamber to be pre-configured with the optimal valve opening degree specific to its characteristics, eliminating the need for continuous adjustment during operation and ensuring consistent gas flow from the start
Data Source
AI summary
Embodiments of valves having adjustable hard stops and methods of use thereof are provided herein. The adjustable valve includes a valve body including an inlet and an outlet; a valve member that is moveable between a fully closed position and a fully open position to selectively allow or prevent flow from the inlet to the outlet; and an adjustable hard stop to limit the fully open position of the valve to an adjusted fully open position.