Adjustable Magnet Array for Mask Wrinkle Removal in Vapor Deposition
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Solution Overview
Problem
The vapor deposition process for display panels faces challenges in improving mask wrinkles caused by stretching technology, which affects the flatness and controllability of the mask, leading to poor vapor deposition effects, especially in high-resolution and complex-shaped display screens.
Innovation Solution
A vapor deposition device equipped with an adjustable magnet array composed of magnet blocks, where the magnetization direction can be adjusted to generate a component force perpendicular to the wrinkles, flattening the mask surface and offsetting gravity, thereby removing wrinkles and enhancing deposition quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If stretching technology is used to prepare the mask, then the mask can be formed with desired shape, but wrinkles are generated on the mask surface reducing flatness
Solution Approach 1:
The patent applies magnetic force as a counterweight to the gravitational force acting on the mask. By adjusting the magnetization direction of the magnet array, a magnetic force component perpendicular to the mask surface is generated, which counteracts gravity and prevents wrinkle formation during the vapor deposition process, thereby maintaining mask flatness without compromising the desired mask shape
Solution Approach 2:
The patent changes the magnetization direction parameter of the magnet array to optimize the magnetic force distribution. By adjusting the magnetization direction, the magnetic force components in different directions are controlled, allowing the mask to maintain flatness while accommodating complex shapes, thus resolving the contradiction between shape formation and surface flatness
2Manufacturing precision
If magnetization direction is adjusted to remove wrinkles, then mask flatness is improved, but device complexity increases
Solution Approach 1:
The magnet array is designed to perform multiple functions: it provides magnetic force to counteract gravity, removes wrinkles from the mask surface, and can be adjusted to accommodate different mask shapes and sizes. This multi-functionality reduces the need for separate mechanisms, thereby limiting the increase in device complexity while achieving improved mask flatness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adjustable magnet array effectively removes mask wrinkles, ensuring a flatter surface and improved vapor deposition effect, even in complex geometries, by applying a magnetic force component perpendicular to the wrinkles and balancing gravity, thus enhancing the precision and quality of the deposition process.
Implementation Method 1
adjusting a magnetization direction of at least one of the magnet blocks, such that a magnetic force generated by the adjustable magnet array on a mask provided on the vapor deposition substrate has a component force Fx in a first direction, for removing wrinkles of the mask which extend in a second direction
Implementation Method 2
adjusting a of a component force Fz of the magnetic force generated by the adjustable magnet array on the mask in a third direction to offset a gravity of the mask
Implementation Method 3
adjusting a of a component force Fz of the magnetic force generated by the adjustable magnet array on the mask in a third direction to offset a gravity of the mask
Implementation Method 4
Vapor deposition is a process of vaporizing or sublimating a substance to be film-formed in a vacuum to cause it to be separated out on the surface of a workpiece or a substrate
Implementation Method 5
heating the evaporation source to perform vapor deposition on the vapor deposition substrate
Data Source
AI summary
An embodiment of the present disclosure provides a vapor deposition device and a vapor deposition method thereof. The vapor deposition device comprises an adjustable magnet array. The adjustable magnet array comprises m magnet blocks, wherein a magnetization direction of at least one of the magnet blocks is adjustable. The vapor deposition device is used to prepare a film.