Adjustable Magnetic Insert for Tubular Sputtering Target
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Solution Overview
Problem
Existing tubular sputtering targets face issues with non-uniform material removal due to magnetic field deviations, leading to reduced material utilization and shorter working life, particularly in monolithic targets with complex production engineering requirements.
Innovation Solution
A connection piece with an alterable magnetic insert along its axial direction, allowing for purposeful adjustment of the magnetic field to optimize material removal, using ferromagnetic metals or alloys with good machinability and corrosion resistance, connected via a screw joint or accessible on the inner or outer face for precise positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If monolithic tube targets are used to achieve higher utilization factor and temperature resistance, then material utilization improves, but mechanical machining complexity and vulnerability of end regions worsen
Solution Approach 1:
The target system is divided into separate components: a monolithic tube target body and a separate connection piece with magnetic inserts. This segmentation allows the target body to be optimized for sputtering performance while the connection piece handles mechanical interface requirements, reducing overall production complexity.
Solution Approach 2:
A connection piece acts as an intermediary component between the monolithic target body and the external mounting system. This intermediary absorbs the mechanical complexity and vulnerability of end region machining, protecting the valuable monolithic target body while enabling standardized mechanical interfaces.
2Productivity
If magnetic inserts are made alterable in position to optimize material removal uniformity, then material utilization improves, but device complexity increases
Solution Approach 1:
The magnetic inserts are designed to be movable along the axial direction within the connection piece, allowing dynamic adjustment of their position. This enables optimization of the magnetic field distribution to achieve uniform material removal, while the simplicity of the adjustment mechanism keeps added complexity minimal.
Solution Approach 2:
The position parameter of the magnetic inserts can be changed to optimize performance. By adjusting the axial position of the magnetic inserts, the magnetic field distribution is modified to compensate for non-uniform material removal patterns, improving overall material utilization without requiring complex redesigns.
3Reliability
If ferromagnetic materials are used for magnetic inserts to control magnetic field, then magnetic field control improves, but manufacturing and corrosion resistance requirements worsen
Solution Approach 1:
Different ferromagnetic materials can be selected based on specific application requirements, allowing optimization of the balance between magnetic properties, machinability, and corrosion resistance. The material parameters can be changed to match the specific operating conditions and performance priorities.
Solution Approach 2:
The connection piece with magnetic inserts is designed as a replaceable component rather than a permanent part of the target body. This allows use of ferromagnetic materials that provide adequate magnetic field control for the intended service life, after which the entire connection piece can be replaced rather than requiring complex repair or material substitution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution extends the service life of tubular targets by improving material utilization through controlled magnetic field adjustments, reducing material removal in high-wear areas and simplifying production engineering by allowing adaptable design without complex retooling.
Implementation Method 1
a magnetic insert, wherein the position of the magnetic insert is alterable along the axial direction of the connection piece
Implementation Method 2
using ferromagnetic metals or alloys with good machinability and corrosion resistance
Data Source
AI summary
A connection piece for a tubular target which has a cylindrical inner surface and a cylindrical outer surface and at least one magnetic insert. The position of the magnetic insert is adjustable along the axial direction of the connection piece on at least an inner surface or outer surface of the connection piece.