Adjustable Mass Resolving Aperture for Ion Beam Purity
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Solution Overview
Problem
Conventional ion implantation systems face inefficiencies in ion beam filtering due to residual ions with close but incorrect charge-to-mass ratios, leading to contamination and reduced product quality, while traditional power transmission methods, such as copper cables, suffer from significant energy loss and mechanical limitations.
Innovation Solution
A segmented and adjustable mass resolving aperture with curved surfaces is introduced in ion implantation systems, allowing real-time adjustments to exclude incorrect ions and reduce residue buildup, combined with a closed plasma channel superconductor that uses photoionization and magnetic fields to create a low-resistance conductive path for charged particles, enhancing energy transmission efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a fixed mass resolving aperture is used, then the device structure is simple, but it cannot exclude incorrect ions effectively and leads to contamination
Solution Approach 1:
The mass resolving aperture is divided into multiple independently adjustable segments. Each segment can be positioned separately to selectively block incorrect ion species while allowing desired ions to pass through, thereby improving ion beam purity without requiring a completely complex device structure.
Solution Approach 2:
The aperture segments are made dynamically adjustable during operation. By changing the position of individual segments in real-time, the system can adapt to different ion species and optimize exclusion effectiveness, resolving the contradiction between simplicity and effectiveness.
2Measurement precision
If a smaller aperture opening is used to exclude incorrect ions, then ion species resolution is improved, but beam current is reduced
Solution Approach 1:
Instead of reducing the entire aperture size, only specific segments are positioned to block incorrect ions. This segmented approach maintains a larger total open area for desired ions while selectively excluding unwanted species, thus preserving beam current while achieving mass resolution.
Solution Approach 2:
Different segments of the aperture have different local functions - some segments block specific mass ranges while others remain open. This local differentiation allows the aperture to simultaneously achieve high mass resolution for specific species while maintaining high beam current through other regions.
3Quantity of substance
If a larger aperture opening is used to maintain beam current, then ion species resolution is reduced and incorrect ions are not excluded
Solution Approach 1:
The aperture is segmented to allow different regions to serve different purposes. Larger open areas maintain beam current while specific segmented regions are positioned to block incorrect ions, achieving both high beam current and effective ion species separation simultaneously.
4Loss of energy
If a traditional copper cable system is used for power transmission, then the system is mechanically stable, but energy loss is significant
Solution Approach 1:
The transmission medium is changed from solid copper to plasma state. By changing the physical state and electrical properties of the transmission medium, the system achieves near-zero electrical resistance and dramatically reduced energy loss, accepting increased system complexity for substantial energy efficiency gains.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves ion beam purity and product quality by effectively excluding incorrect ions and reduces energy transmission losses by utilizing a plasma-based system with zero electrical resistivity, achieving efficient and flexible ion implantation and power transmission.
Implementation Method 1
a mass analyzer 310, consisting of dipole and/or quadrapole magnetic and/or EM fields that bend the ion beam, within a practical envelope, at an angle approximating 90 degrees from the original flight path
Implementation Method 2
Differing mass will have differing momentum for that ion species that will isolate the trajectories through the mass analyzer 310
Implementation Method 3
photoionization and magnetic fields to create a low-resistance conductive path for charged particles
Implementation Method 4
magnetic field producing means for producing a magnetic field within the ionization space to separate the plasma components into regions having different charge to mass ratios
Implementation Method 5
create a low-resistance conductive path for charged particles, enhancing energy transmission efficiency
Data Source
AI summary
Embodiments of the invention relate to a mass resolving aperture that may be used in an ion implantation system that selectively exclude ion species based on charge to mass ratio (and/or mass to charge ratio) that are not desired for implantation, in an ion beam assembly. Embodiments of the invention relate to a mass resolving aperture that is segmented, adjustable, and/or presents a curved surface to the oncoming ion species that will strike the aperture. Embodiments of the invention also relate to the filtering of a flow of charged particles through a closed plasma channel (CPC) superconductor, or boson energy transmission system.