Adjustable MEMS Ventilation Openings for Signal Adaptation
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Solution Overview
Problem
Microphone sensors with fixed ventilation holes are prone to distortion from high energetic signals and require multiple sensors for different applications, increasing costs due to fixed corner frequencies that cannot be adjusted during operation.
Innovation Solution
Incorporating adjustable ventilation openings in MEMS structures that can be switched between open, closed, or intermediate positions, allowing for tunable threshold frequencies by varying the actuation voltage, thereby adjusting the RC constant and sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If fixed ventilation holes are used in MEMS microphone structures, then manufacturing is simplified and costs are reduced, but the corner frequency cannot be adjusted during operation leading to distortion from high energetic signals and requiring multiple sensors for different applications
Solution Approach 1:
The ventilation opening is made dynamically adjustable through a movable membrane structure that can change its state (open/closed/intermediate positions) in response to control signals. This allows the corner frequency to be adapted during operation without changing the physical manufacturing structure, resolving the contradiction between adaptability and manufacturing simplicity.
Solution Approach 2:
A single MEMS sensor with an adjustable ventilation opening can perform multiple functions across different applications by dynamically changing its corner frequency. This eliminates the need for multiple fixed-frequency sensors, providing universal adaptability while maintaining a relatively simple unified structure rather than multiple specialized structures.
2Adaptability or versatility
If multiple MEMS sensors with different fixed corner frequencies are used to handle different applications, then adaptability to different signal conditions is improved, but system cost increases
Solution Approach 1:
The invention implements a universal MEMS sensor design where a single sensor can adapt to different applications by dynamically adjusting its ventilation opening state. This multi-functional approach allows one sensor to replace multiple fixed-frequency sensors, reducing the quantity of components needed while maintaining adaptability across different signal conditions.
Solution Approach 2:
The patent combines the functions of multiple fixed-frequency sensors into a single variable-frequency sensor by integrating an adjustable ventilation mechanism. This merging of functions into one component reduces the total number of sensors required while preserving the ability to handle different applications.
3Measurement precision
If the ventilation opening is made adjustable to handle high energetic signals, then signal-to-noise ratio is improved, but the device complexity increases
Solution Approach 1:
The ventilation opening incorporates a dynamic control mechanism that adjusts the opening state based on signal conditions. This dynamic adjustment allows the system to optimize signal-to-noise ratio by opening the ventilation for high energetic signals and closing it for normal conditions, accepting increased device complexity as necessary for improved measurement precision.
Data Source
AI summary
A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.