Adjustable Flow Nozzle Manifold for Precise Individual Spray Control
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Solution Overview
Problem
Current semiconductor processing methods lack precise and efficient individual adjustment of flow rates through spray nozzles, requiring time-consuming macro-level adjustments that do not accurately control the flow of liquid through each nozzle.
Innovation Solution
An adjustable flow nozzle system with individually adjustable nozzles, allowing for precise control of flow rates by rotating components with overlapping inlet openings to form a collective opening, enabling manual adjustment without disassembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If macro-level adjustment of total flow to all spray nozzles is used, then the system is simple to operate, but individual nozzle flow control precision is poor
Solution Approach 1:
The patent divides the flow control system into individual independently adjustable nozzles, where each nozzle can be controlled separately through rotation of its body relative to the manifold. This segmentation allows precise individual flow control while maintaining a relatively simple overall structure where each nozzle unit is self-contained and adjustable without affecting others.
Solution Approach 2:
The patent implements dynamic adjustability by allowing each nozzle to be rotated to different angular positions, changing the effective opening area dynamically. This enables continuous flow rate adjustment from fully closed to fully open positions, providing precise control without requiring complex valve mechanisms or multiple discrete components.
2Measurement precision
If individual spray nozzles are changed within the manifold, then flow control precision is improved, but adjustment time increases
Solution Approach 1:
The patent enables rapid dynamic adjustment by rotating the nozzle body to change flow rate, eliminating the need for time-consuming disassembly or replacement operations. The rotational adjustment mechanism allows operators to quickly modify flow rates in real-time without interrupting the overall system operation or requiring tool-assisted disassembly.
Solution Approach 2:
The nozzle design allows self-adjustment through direct rotation of the nozzle body, which inherently controls the flow path. This self-service mechanism eliminates the need for external adjustment tools, disassembly procedures, or complex valve actuation systems, enabling operators to quickly modify individual nozzle flow rates by simply rotating the nozzle to the desired position.
3Measurement precision
If rotational adjustment of nozzle components is implemented, then flow control precision is improved, but device complexity increases
Solution Approach 1:
The patent segments the nozzle into a rotatable nozzle body and a stationary manifold connection, where the rotational interface between these two simple components provides the flow control function. This segmentation avoids the need for complex internal valve mechanisms, multiple moving parts, or sophisticated actuation systems within each nozzle unit.
Solution Approach 2:
The patent achieves precise flow control through simple rotational movement of the nozzle body, which dynamically changes the effective opening area formed by the interface between the nozzle and manifold. This dynamic geometric adjustment requires only a single rotational degree of freedom and simple sealing interfaces, avoiding complex mechanical linkages, springs, or actuation mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient control of fluid flow through each nozzle, providing a broad range of flow rates with minimal effort, enhancing process accuracy and efficiency in semiconductor processing.
Implementation Method 1
Flow control valves or fixed orifice nozzles are typically used to reduce flow rate, but these methods increase pressure drops and complicate actuator sizing
Implementation Method 2
An adjustable flow nozzle with a movable needle valve is disclosed. The needle valve may be adjusted to change the effective opening area of the nozzle, thereby controlling the flow rate
Data Source
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AI summary
Various embodiments for an adjustable flow nozzle system having a manifold with a plurality of adjustable flow nozzles in which the flow rate of each adjustable flow nozzle may be individually adjusted are described herein.