Adjustable Partition Liquid Measuring Beaker for Semiconductor Fabrication

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Solution Overview

Problem

In semiconductor manufacturing, the liquid mixing process is hindered by piping stress and pump vibration, which decrease the accuracy of load cell measurements, narrowing the process window and reducing mixing precision.

Innovation Solution

A liquid measuring beaker with an adjustable partition allows for precise measurement and delivery of liquids, using a vertically movable partition to adjust the volumetric capacity and drain excess liquid, improving mixing precision and recycling excess liquid to reduce costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If load cell measurement is used for liquid mixing, then liquid mixing can be performed, but measurement accuracy decreases due to piping stress and pump vibration

Engineering Contradiction:

Improveliquid measurement accuracyVSAvoidpiping stress and pump vibration

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent extracts the liquid measurement function from the mixing tank system by using a separate graduated cylinder. The liquid is measured in the graduated cylinder before being transferred to the mixing tank, isolating the measurement process from the harmful vibrations and stresses of the mixing system.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The graduated cylinder serves as an intermediary device between the liquid source and the mixing tank. It provides a stable, vibration-free environment for measurement while allowing accurate transfer of the measured liquid to the mixing system.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If load cell measurement is used, then liquid mixing process can proceed, but process window is narrowed

Engineering Contradiction:

Improveliquid mixing process efficiencyVSAvoidprocess window

Core Design Contradiction:

ProductivityVSAdaptability or versatility

Solution Approach 1:

By extracting the measurement function to a separate graduated cylinder, the system gains adaptability in handling different liquid volumes and types without being constrained by the limited process window of load cell measurements.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The graduated cylinder allows for visual measurement of various liquid volumes, enabling the process to adapt to different mixing requirements and expand the process window compared to fixed-range load cell measurements.

Inventive Principle:

Principle #35Parameter changes

3Manufacturing precision

If load cell measurement is used, then liquid mixing can be performed, but mixing precision is reduced

Engineering Contradiction:

Improveliquid mixing precisionVSAvoidpump vibration

Core Design Contradiction:

Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The measurement function is extracted from the vibrating mixing system to a separate graduated cylinder, eliminating the harmful effect of pump vibration on measurement accuracy and thereby improving mixing precision.

Inventive Principle:

Principle #2Taking out (Extraction)

Data Source

PatentUS10155208B2Liquid mixing system for semiconductor fabrication

Publication Date: 2018.12.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A liquid measuring beaker is suitable for measuring an amount of a liquid required in a liquid mixing process. The liquid measuring beaker includes a shell and an adjusting partition. The shell defines a reservoir having a volumetric capacity, in which the shell has a first opening passing through a bottom of the shell. The adjusting partition is vertically movable in the reservoir for adjusting the volumetric capacity, in which the adjusting partition has a second opening passing through the adjusting partition.