Adjustable Pellicle Handling Tool for Semiconductor Lithography
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Solution Overview
Problem
Conventional pellicle handling tools often cause distortion of the pellicle frame due to inaccurate insertion of pins, leading to wrinkles on the pellicle film and increased production costs due to the need for multiple tools to accommodate varying hole positions.
Innovation Solution
A handling tool with a T-shaped handle, U-shaped arms, and adjustable pellicle frame holders that grasp the 4 corners of the pellicle frame, eliminating the need for pre-drilled holes and allowing for accurate and firm grasping without frame distortion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If insertion pins are used to grasp the pellicle frame, then the pellicle can be handled without direct hand contact, but the frame may be distorted when pins are not inserted accurately into holes
Solution Approach 1:
The invention extracts the insertion pin mechanism from the frame holes and replaces it with a clamp structure that directly grasps the frame edges. This eliminates the need for precise hole alignment and prevents frame distortion by avoiding penetration of the frame structure.
Solution Approach 2:
The clamp structure serves as an intermediary between the operator's hand and the pellicle frame. It provides a secure grasp on the frame edges without requiring direct contact with the pellicle film, thereby preventing both contamination and structural distortion.
2Measurement precision
If multiple handling tools are prepared to accommodate varying hole positions, then accurate grasping can be achieved, but device complexity and cost increase
Solution Approach 1:
The clamp structure is designed with adjustable positioning mechanisms that allow a single tool to accommodate various hole positions and frame sizes. The universal design eliminates the need for multiple specialized tools while maintaining precise grasping capability.
3Reliability
If insertion pins are inserted into holes to grasp the pellicle, then the pellicle can be held securely, but the pins may hit and push the pellicle frame causing distortion
Solution Approach 1:
The invention converts the potential harm of pin insertion (frame distortion) into a beneficial clamp-grasp mechanism. The clamp structure provides secure holding reliability while inherently preventing the harmful effect of frame penetration and distortion through its non-invasive design.
Data Source
AI summary
A handling tool for handling a pellicle which is used in the lithography carried out in a manufacturing process of semiconductor devices, comprising a handle, a main shaft connected with a fore-end of the handle to form a T-shaped part, two parallel arms protruding forward from the both ends of the said main shaft orthogonally to form a U-shaped part, and four pellicle frame holders of which two are each provided on the inward side surface of each arm respectively, wherein the arms are designed in a manner such that they are both capable of moving towards and away from each other so as to be able to adjust the arm-to-arm distance, and the said holders are provided so that they can grasp the frame's side surfaces at the four corners of the pellicle frame when the said arms are closed.