Adjustable Pin Resistance Diode for ESD Protection

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Solution Overview

Problem

Conventional diodes used in semiconductor devices often result in pin resistance that is lower than the specified minimum, due to their smaller resistance and capacitance, which can lead to inadequate electrostatic discharge protection, especially at high speeds.

Innovation Solution

The diode structure is modified by increasing the distance between impurity areas and contact pitches, allowing for adjustable pin resistance by varying the distance between the N-type and P-type impurity areas, as well as the contact pitches, to meet the required resistance specifications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional diode is used for electrostatic discharge protection, then the electrostatic protection function is provided, but the pin resistance becomes lower than the specified minimum

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidpin resistance
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the physical parameters of the diode structure by increasing the distance between the anode and cathode regions, and increasing the contact pitch between metal contacts and semiconductor regions. These parameter modifications directly increase the pin resistance while preserving the electrostatic discharge protection function.

Inventive Principle:
Principle #35Parameter changes

2Object-affected harmful factors

If the distance between anode and cathode is increased, then the pin resistance increases, but the device area increases

Engineering Contradiction:
Improvepin resistanceVSAvoiddevice area
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The patent optimizes the spatial arrangement by strategically positioning the anode and cathode regions in specific areas of the semiconductor substrate, utilizing dimensional optimization to achieve increased resistance without proportional area increase.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Object-affected harmful factors

If the contact pitch is increased, then the pin resistance increases, but the manufacturing precision requirements increase

Engineering Contradiction:
Improvepin resistanceVSAvoidcontact pitch control
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent establishes specific parameter ranges for contact pitch (e.g., 5-20 micrometers) that balance the need for increased pin resistance with manufacturability. These optimized parameter ranges ensure that resistance specifications are met while remaining within standard manufacturing capabilities.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This adjustment significantly increases the pin resistance of semiconductor products, ensuring compliance with specified resistance levels while minimizing the impact on capacitance, thereby enhancing electrostatic discharge protection.

Implementation Method 1

at least one N-type impurity doping area formed in the P-type well, an isolation area formed to surround the N-type impurity doping area, a P-type impurity doping area formed to surround the isolation area

Methodology Applied
Scientific EffectImpurity doping: Dopants

Implementation Method 2

The first electrostatic discharge section 110 includes a P-type well 111 formed in the surface of a P-type semiconductor substrate, one or a plurality of N+ impurity areas 112 formed in the surface of the substrate within the P-type well 111

Methodology Applied
Scientific EffectPN junction: Diode

Data Source

PatentUS8373255B2Diode for adjusting pin resistance of a semiconductor device
Publication Date: 2013.02.12 SK HYNIX INC
  • US8373255B2 patent drawing
  • US8373255B2 patent drawing
  • US8373255B2 patent drawing

AI summary

A diode comprises a P-type well formed in a semiconductor substrate, at least one N-type impurity doping area formed in the P-type well, an isolation area formed to surround the N-type impurity doping area, a P-type impurity doping area formed to surround the isolation area, first contacts formed in the N-type impurity doping area in a single row or a plurality of rows, and second contacts formed in the P-type impurity doping area in a single row or a plurality of rows, wherein pin resistance can be adjusted through changing any one of a distance between the N-type impurity doping area and the P-type impurity doping area, a contact pitch between the first contacts, and a contact pitch between the second contacts.