Adjustable Spray Bar Assembly for Marangoni Drying Consistency
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Solution Overview
Problem
Current Marangoni drying systems for substrates after chemical mechanical polishing exhibit variability in drying results due to inconsistencies in chamber conditions, leading to streaking, spotting, and residue marks on substrates.
Innovation Solution
An adjustable spray bar assembly that can be positioned and oriented about x, y, and z axes, allowing for precise control of solvent vapor delivery to minimize inconsistencies in substrate drying across different batches and chamber configurations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a static spray bar is used to deliver solvent vapor, then the drying process can be performed, but variability between chamber conditions creates inconsistent drying results between batches
Solution Approach 1:
The spray bar is made adjustable and reconfigurable, allowing dynamic adaptation to different chamber conditions and substrate requirements. The system transitions from a fixed static structure to a dynamic one that can be repositioned and reconfigured to maintain consistent drying results across varying conditions.
Solution Approach 2:
The system allows changes in spray bar position, orientation, and configuration parameters to compensate for chamber condition variations. By adjusting these parameters, the system maintains optimal drying performance across different batches and chamber states.
2Manufacturing precision
If chamber conditions vary (bath fluid levels, mechanical characteristics), then the drying process must adapt, but static spray bars cannot adjust, leading to streaking, spotting, and residue marks
Solution Approach 1:
The spray bar system incorporates adjustable mounting mechanisms that enable repositioning and reconfiguration to maintain optimal spray patterns despite chamber condition variations, thereby preventing surface defects while providing operational flexibility.
3Reliability
If solvent vapor is delivered to the substrate, then drying occurs through surface tension gradient, but inconsistent vapor delivery causes variability in drying quality
Solution Approach 1:
The spray bar positioning system is designed to be dynamically adjustable, allowing operators to optimize vapor delivery consistency across different operating conditions without requiring overly complex automated control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adjustable spray bar assembly ensures more consistent and effective drying of substrates, reducing streaking, spotting, and residue marks by allowing for tailored vapor delivery based on substrate position and orientation, thereby enhancing the reliability of the Marangoni drying process.
Implementation Method 1
The solvent vapor dissolves into the fluid meniscus, creating a surface tension gradient. The presence of a surface tension gradient causes the bath fluid to flow away from a region of low surface tension at the tip of the drying meniscus and off the substrate
Implementation Method 2
Marangoni drying creates a surface tension gradient to induce bath fluid to flow from a substrate in a manner that leaves the substrate virtually free of the bath fluid. The Marangoni drying technique utilizes a solvent with a lower surface tension than the bath fluid
Data Source
AI summary
A method and apparatus for Marangoni substrate drying is disclosed which includes an adjustable spray bar assembly having mounting brackets coupled to a support structure of a drying system, a base assembly coupled to the mounting brackets and disposed parallel to a face of the support structure, and a mounting assembly coupled to and parallel with the base assembly. The mounting assembly is adjustable in a vertical direction at two distal ends. The mounting assembly includes arms onto which one or more spray bars may be disposed. While secured to the mounting assembly, the one or more spray bars may be rotated about a longitudinal axis.