Adjustable Substrate Support for Uniform Cooling of Flat and Recessed Templates
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Solution Overview
Problem
Existing processing technologies fail to effectively clean templates with different base shapes, such as flat and recessed surfaces, leading to inconsistent cooling and potential frost formation during the freeze cleaning process.
Innovation Solution
A processing apparatus with a stage and substrate support system that adjusts its position based on the template type, ensuring uniform cooling by maintaining a predetermined distance between the template and the cooling medium supply, preventing air circulation and frost formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a cooling medium is supplied to clean templates with different base shapes, then cleaning effectiveness is improved, but uniform cooling is difficult to achieve leading to frost formation
Solution Approach 1:
The substrate support is made movable relative to the stage, allowing the distance between the template and cooling medium supply to be adjusted based on the template type (flat or recessed). This dynamic adjustment ensures uniform cooling for different base shapes while preventing frost formation
Solution Approach 2:
Different distances between the template and cooling medium supply are used depending on the template type. Flat templates use one distance while recessed templates use another, optimizing cooling uniformity for each specific case
2Adaptability or versatility
If the substrate support position is fixed, then device complexity is reduced, but the apparatus cannot process both flat and recessed surface templates effectively
Solution Approach 1:
The substrate support is made movable relative to the stage, allowing the distance between the template and cooling medium supply to be adjusted based on the template type (flat or recessed). This dynamic adjustment ensures uniform cooling for different base shapes while preventing frost formation
Solution Approach 2:
A single substrate support system is designed to handle both flat and recessed surface templates by adjusting its position, eliminating the need for separate processing systems for different template types
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves uniform cooling and effective removal of foreign substances from both flat and recessed surface templates, maintaining reproducibility and preventing frost formation, even when processing templates with different base shapes.
Implementation Method 1
a cooling medium supplied from a supply port (125) of the stage (12)... ensuring uniform cooling by maintaining a predetermined distance between the template and the cooling medium supply
Data Source
AI summary
According to one embodiment, a processing apparatus for processing substrates having different base shapes includes a stage comprising a first portion having a substrate facing surface and an opening extending therethough connected to a source of a cooling fluid, and a second portion located outwardly of the first portion, a substrate support, having a substrate support surface thereon, extending over the second portion, a process fluid outlet overlying the first portion, and a driving unit coupled to one of the stage and the first portion, wherein the driving unit is configured to move at least one of the substrate support surface and the substrate facing surface such that the relative locations of the substrate support surface and the substrate facing surface of the stage are changeable based on the shape of a substrate to be processed in the apparatus.