Adjustable Substrate Support Platform for Stable Chamber Positioning
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Solution Overview
Problem
Existing devices for holding workpieces in process chambers lack the ability to precisely adjust the height and position of workpieces while ensuring secure and stable support, particularly in environments with temperature fluctuations and varying workpiece sizes.
Innovation Solution
A device with height-adjustable support elements, featuring pivotable limb elements and adjustable pivot angles, coupled at angled pivot axes, and made from graphite to minimize friction and warpage, allowing secure and stable positioning of workpieces with minimal backlash.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If fixed support elements are used for the tray, then the device structure is simple, but the height adjustment precision is poor
Solution Approach 1:
The support elements are designed as height-adjustable mechanisms with pivotable limb elements that can dynamically change their configuration. The first and second limb elements can pivot relative to each other about a pivot axis, enabling continuous height adjustment of the tray while maintaining structural integrity. This dynamic design resolves the contradiction by providing precise height adjustment capability without requiring an overly complex fixed structure.
Solution Approach 2:
The support elements are divided into multiple segmentable limb elements (first limb element and second limb element) that can pivot relative to each other. This segmentation allows independent adjustment of each segment, enabling precise height control while keeping individual segments relatively simple in structure, thus resolving the contradiction between adjustment precision and overall structural complexity.
2Adaptability or versatility
If height-adjustable support elements are used, then the workpiece positioning flexibility is improved, but the stability of workpiece holding deteriorates
Solution Approach 1:
The device incorporates locking mechanisms that provide feedback-based stabilization. When a desired height position is reached, the locking mechanism engages to secure the limb elements in place, preventing unintended movement. This feedback control ensures that while the support elements remain adjustable for flexibility, they maintain stable positioning once adjusted, resolving the contradiction between adaptability and stability.
Solution Approach 2:
The support elements transition between dynamic (adjustable) and static (locked) states. During adjustment, the limb elements can pivot freely to achieve the desired height for different workpiece sizes. Once positioned, the locking mechanism engages to create a stable, rigid structure. This dynamic-static transition resolves the contradiction by providing both flexibility during adjustment and stability during operation.
3Stability of the object's composition
If the pivot axes of support elements are arranged at angles, then the tray stability against rotation is improved, but the device complexity increases
Solution Approach 1:
The first and second support elements have their pivot axes arranged at angles to each other, creating an asymmetric configuration. This asymmetric arrangement prevents the tray from rotating about any single axis, as the angled pivot axes provide complementary rotational constraints. The asymmetry resolves the contradiction by achieving enhanced stability through a relatively simple angular arrangement rather than requiring complex multi-axis constraint mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and stable positioning of workpieces in process chambers, accommodating various sizes and temperatures, with reduced movement and backlash, enhancing the reliability and longevity of the holding device.
Implementation Method 1
the first and/or second limb element and the shaft element consist of graphite... the axial spring element acts on the limb element... to reduce backlash between the first and/or second limb element and the shaft element by means of preloading and to bestow inertia upon the movements of the limb element by means of additional frictional forces
Implementation Method 2
On account of its low coefficient of friction, graphite as the material for the limb elements has a particularly positive effect on the ability of the closely abutting limb elements to move in a sliding manner
Implementation Method 3
The cone element centres the force effect of the axial spring element on the limb element, such that backlash between the limb element and the shaft element in the radial and axial direction is reduced to a particular degree
Data Source
AI summary
The present disclosure relates to a device for holding workpieces in a process chamber. The present disclosure additionally relates to a coating system and to a method for coating a workpiece. In order to allow for precise adjustment of the height of the position of workpieces while supporting same in a secure and stable manner, the holding device includes a platform for the workpieces, a height-adjustable first support element and a height-adjustable second support element for the platform, wherein each of the support elements has at least one first and one second limb element, wherein the respective first and the respective second limb element are coupled so as to be pivotable relative to one another about a pivot axis, and wherein the pivot axis of the first support element is arranged at an angle to the pivot axis of the second support element.