Adjustable Wafer Frame Cassette With Sliding Width Alignment
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Solution Overview
Problem
The semiconductor industry faces challenges with multiple cassette sizes for different wafer diameters, leading to increased storage space requirements, inventory costs, costly work stoppages, and labor-intensive equipment changes, which result in improper alignment and potential damage to wafers during handling and processing.
Innovation Solution
An adjustable width cassette with fixed height and depth, featuring elongated slots on side panels, a sliding bar assembly, and spring-loaded press screws that allow for expansion or contraction to accommodate various widths, ensuring secure storage and transport of thin planar objects without the need for multiple cassette sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple cassette sizes are used to accommodate different wafer diameters, then all wafer sizes can be securely held and transported, but storage space requirements and inventory costs increase
Solution Approach 1:
The cassette width is made dynamically adjustable through a sliding bar assembly that allows the side panels to move relative to each other. The sliding bar engages with slots in the side panels and can be positioned at multiple discrete locations, enabling the cassette width to be changed to match different wafer diameters (150mm, 200mm, 250mm, 300mm). This dynamic adjustment eliminates the need for multiple fixed-size cassettes, reducing storage space requirements while maintaining the ability to securely hold various wafer sizes
Solution Approach 2:
A single cassette design serves multiple functions by accommodating different wafer sizes through width adjustment. The universal cassette can be configured for 150mm, 200mm, 250mm, or 300mm wafers, replacing the need for separate specialized cassettes for each wafer size. This multi-functionality directly reduces inventory costs and storage space while maintaining secure holding capability for all wafer types
2Adaptability or versatility
If equipment interface mechanisms are modified to facilitate different wafer and frame sizes, then versatility is improved, but work stoppages and cycle time increase
Solution Approach 1:
The width adjustment mechanism allows rapid reconfiguration of the cassette without requiring equipment interface modifications. The sliding bar assembly with predefined engagement positions enables operators to quickly adjust the cassette width for different wafer sizes, minimizing equipment setup time and avoiding costly work stoppages while maintaining the ability to handle various wafer sizes
3Manufacturing precision
If multiple cassette sizes are used, then proper alignment can be maintained for each size, but the probability of improper alignment and wafer damage increases due to frequent changes
Solution Approach 1:
The sliding bar assembly provides predefined engagement positions that ensure proper alignment for different wafer sizes. By maintaining a single cassette design with adjustable width rather than multiple fixed-size cassettes, the system reduces the frequency of changes and associated alignment errors. The mechanical engagement features guide the side panels to precise positions, ensuring reliable alignment while minimizing the risk of wafer damage from improper positioning
Solution Approach 2:
Multiple alignment configurations for different wafer sizes are merged into a single cassette design. The sliding bar assembly integrates multiple positioning functions into one mechanism, allowing the same cassette to achieve proper alignment for 150mm, 200mm, 250mm, or 300mm wafers without requiring separate alignment procedures or increasing the probability of errors
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adjustable width cassette reduces storage space, inventory costs, and minimizes errors associated with equipment setup, while ensuring secure and precise alignment of objects, thereby reducing the risk of damage and improving efficiency in handling and processing.
Implementation Method 1
an adjustable length panel on the top side of the cassette having spring loaded press screws with holes for screw engagement at predefined locations
Data Source
AI summary
An expandable width cassette for storing and transporting thin planar objects of different widths is provided. The cassette 10 includes two side panels 12 of fixed height opposite and parallel to one another having a series of elongated slots on the inner surface of the side panels for supporting planar objects, a sliding bar assembly 13 on the bottom side of the cassette, and an adjustable length panel 14 on the top side of the cassette. Spring loaded press screws 143 disengaged from locator holes at predefined locations in the top panel allow the cassette width to be altered by pushing or pulling the side panels. A wafer film frame cassette includes a back stop mechanism which further serves to align with a frame notch.