Adjustable Wafer Holder Cover for Efficient Wafer Packaging
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Solution Overview
Problem
The existing methods for transporting and packaging nitride-based semiconductor wafers are inefficient, as they require excessive protective layers when the number of wafers is low, leading to waste and increased handling risks due to the fragility of the wafers.
Innovation Solution
A wafer holder system comprising a carrier plate, blocking devices, and a movable cover plate, where the cover plate is adjustable in height using fasteners that pass through openings in the blocking devices, allowing for optimal spacing and reduced need for protective layers regardless of the number of wafers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple protecting layers are used to fill space between wafers and container cover, then wafer protection is improved, but packaging efficiency deteriorates and waste increases
Solution Approach 1:
The container cover is designed with movable/adjustable height capability, allowing the spacing between the cover and carrier plate to be dynamically changed according to the number of wafers being packaged. This eliminates the need for excessive protecting layers while maintaining adequate protection, thereby improving packaging efficiency and reducing waste.
Solution Approach 2:
The height parameter of the container cover is made variable rather than fixed. By changing the height parameter to match the actual number of wafers, the system achieves optimal protection without unnecessary protecting layers, resolving the contradiction between protection and efficiency.
2Stability of the object's composition
If multiple protecting layers are used to fill space, then wafer stability is improved, but time consumption increases
Solution Approach 1:
The adjustable height cover provides dynamic stability adaptation. Instead of using multiple static protecting layers, the cover height is adjusted to provide the necessary stability directly, reducing packaging time while maintaining wafer stability.
3Reliability
If protecting layers are used to fill space, then wafer protection is improved, but material waste increases
Solution Approach 1:
By changing the height parameter of the container cover to be variable, the system uses minimal necessary protecting layers instead of excessive amounts. This reduces material waste while maintaining adequate wafer protection.
Data Source
AI summary
A wafer holder including a carrier plate, blocking devices, fasteners, and a cover plate is provided. The carrier plate has a carrier surface. The blocking devices are disposed on the carrier plate. The cover plate is located above the carrier surface of the carrier plate. The blocking devices are disposed around the carrier surface. Each of the blocking devices has a plurality of openings. The fasteners pass through the openings, and the cover plate is fastened on the blocking devices through fasteners.