Adjustable Width Trolley for Substrate Processing Component Maintenance
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Solution Overview
Problem
In semiconductor wafer processing facilities, the maintenance of wafer inspecting apparatuses often obstructs passage due to the large footprint of trolleys supporting components, which are not adaptable to varying pull-out amounts, leading to space constraints and operational inefficiencies.
Innovation Solution
A trolley with a movable support base that can expand or contract in the front-rear direction to accommodate different pull-out amounts of components, allowing for adjustable width to minimize obstruction and optimize space usage during maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the trolley is designed with a fixed large footprint to support components with maximum pull-out amount, then the support capability is improved, but the passage obstruction and space occupancy increase
Solution Approach 1:
The trolley employs a movable support base that can shift position along the trolley body, enabling the footprint to dynamically adjust between a first footprint when the support base is at a first position and a second footprint when at a second position. This dynamic configuration allows the trolley to adapt its support capability to match the actual pull-out amount of components, rather than always occupying maximum space.
Solution Approach 2:
The support function is segmented into a movable support base that can be independently positioned along the trolley body. This segmentation allows the support base to be relocated to different positions (first position, second position, or intermediate positions) depending on the component's pull-out amount, thereby optimizing space usage while maintaining support capability.
2Area of stationary object
If the trolley footprint is reduced to minimize passage obstruction, then the space occupancy is improved, but the support capability for components with large pull-out amount deteriorates
Solution Approach 1:
The movable support base enables the trolley to dynamically expand its effective footprint when needed. When supporting components with large pull-out amounts, the support base is positioned at the second position or extended positions, effectively increasing the footprint to provide adequate support. When components have small pull-out amounts, the support base is repositioned to minimize footprint, thus resolving the contradiction between footprint reduction and support capability.
Solution Approach 2:
The trolley is designed with multi-functionality to handle various component sizes and pull-out amounts using the same device. The movable support base can be positioned at multiple locations along the trolley body, allowing the single trolley to universally support different component configurations without requiring multiple specialized trolleys, thereby maintaining support capability while optimizing space usage.
3Adaptability or versatility
If the support base is made movable to adapt to varying pull-out amounts, then the adaptability is improved, but the device complexity increases
Solution Approach 1:
The movable support base provides adaptability through a relatively simple mechanical structure. The support base can be moved along the trolley body to different positions (first position, second position, or intermediate positions) to accommodate varying pull-out amounts. This dynamic positioning mechanism achieves high adaptability without requiring complex automated systems, maintaining structural simplicity while enabling flexible adjustment to different component configurations.
Data Source
AI summary
A trolley includes a trolley body which in turn includes a wheel that is freely movable on a floor, and a first support that supports a component of a substrate processing apparatus that slides in a lateral direction and is pulled out to an outside of the substrate processing apparatus. The trolley also includes a second support that is connected to the trolley body so as to be freely movable between a first position where a width of the trolley in the lateral direction is a first length and a second position where the width in the lateral direction is a second length longer than the first length, and configured to support the component at the second position together with the first support.