Adjusting Mechanism for Panel Deformation in Electron Beam Detection
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Solution Overview
Problem
Scanning electron microscopes face challenges in achieving optimal image resolution due to deformations caused by high vacuum conditions and assembly errors, making it difficult to maintain the required object distance for accurate semiconductor defect detection.
Innovation Solution
An adjusting mechanism comprising a support plate and screw sets with different metal materials and configurations, including bushings and a lining pad, to adjust panel deformations and ensure optimal object distance for electron beam detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Difficulty of detecting and measuring
If a scanning electron microscope is used to detect semiconductor defects, then detection capability is improved, but image resolution deteriorates due to panel deformation from vacuum conditions and assembly errors
Solution Approach 1:
The adjusting mechanism is installed on the panel before vacuum conditions are applied, allowing preemptive adjustment of the panel's flatness. The screws can be pre-positioned to compensate for expected deformation, ensuring the panel maintains optimal flatness when the electron beam detection device operates in vacuum conditions.
Solution Approach 2:
The adjusting mechanism changes the physical parameters of the panel by applying mechanical force through adjustable screws. This alters the panel's shape and flatness parameters, compensating for deformation caused by vacuum conditions and assembly errors, thereby maintaining the required object distance for optimal image resolution.
2Measurement precision
If the object distance is adjusted to achieve optimal image resolution, then measurement precision is improved, but device complexity increases due to the need for adjustment mechanisms
Solution Approach 1:
The adjustment mechanism is segmented into multiple independent adjustable screws distributed across the panel surface. Each screw can be independently adjusted to address local deformation issues, allowing precise control of panel flatness without requiring a complex monolithic adjustment system.
Solution Approach 2:
The adjustable screws act as intermediaries between the panel and the electron beam detection device. They provide a mechanical means to transfer adjustment forces to the panel, enabling fine-tuning of the object distance without directly modifying the detection device itself.
3Difficulty of detecting and measuring
If assembly errors are present in the chamber or stage, then manufacturing precision deteriorates, but detection capability is maintained
Solution Approach 1:
The adjusting mechanism on the panel applies preliminary counter-actions to compensate for assembly errors in the chamber or stage. By adjusting the panel's position and flatness, the system pre-compensates for misalignments, ensuring that the electron beam detection device can still achieve optimal image resolution despite manufacturing imperfections.
Data Source
AI summary
An adjusting mechanism for adjusting a deformation of a panel and an electron beam detection apparatus comprising the same are disclosed, the adjusting mechanism including: a support plate, which is provided opposite to the panel, with a periphery of the support plate being in positive fit with a periphery of the panel; and at least one screw set, each screw set comprising: at least one first screw, each first screw penetrating through the support plate, and in turn being connected to the panel by being screwed into the panel; and at least one second screw, each second screw being screwed to penetrate through the support plate and to abut against the panel; the support has its structural rigidity larger than a structural rigidity of the panel.