Adsorbing Element Surface-Increasing Elements Gas Filtration
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Solution Overview
Problem
Conventional cold traps in semiconductor manufacturing processes have limited absorptive capacity due to smooth surfaces, leading to frequent replacement cycles, reduced productivity, and increased labor costs, as they become saturated with particles.
Innovation Solution
A filtering device with an adsorbing element featuring a plurality of surface-increasing elements arranged parallel to the gas flow direction, enhancing contact area and absorption capacity, thereby prolonging replacement cycles and increasing productivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a conventional cylindrical cooling element is used in the cold trap, then the structure is simple and easy to manufacture, but the absorptive area is limited and particles are absorbed quickly leading to frequent replacement
Solution Approach 1:
The patent transforms the conventional cylindrical cooling element into a three-dimensional structure with multiple protrusions and recesses. This dimensional complexity increases the surface area by creating additional absorption sites without significantly increasing the overall volume, thereby extending the replacement cycle while maintaining manufacturability
Solution Approach 2:
The cooling element is designed with a porous or textured surface structure featuring multiple protrusions and recesses. This porous configuration dramatically increases the effective surface area for particle absorption, allowing the element to handle higher particle loads before saturation, thus extending its operational duration
2Device complexity
If a conventional cylindrical cooling element is used, then the device complexity is low, but the absorptive capacity is limited causing frequent maintenance and reduced productivity
Solution Approach 1:
The patent introduces dimensional complexity to the cooling element surface with multiple protrusions and recesses arranged in specific patterns. This increases the absorptive capacity and extends the replacement cycle, thereby improving productivity without requiring a complete system redesign
Solution Approach 2:
The patent modifies the surface geometry parameters of the cooling element by creating protrusions with specific dimensions and spacing. This parameter optimization increases the surface area and absorptive capacity, allowing the system to maintain higher productivity levels with the same basic device architecture
3Ease of manufacture
If the surface of the cooling element is smooth, then the manufacturing is simple, but the contact area with gas is limited reducing particle absorption efficiency
Solution Approach 1:
The patent employs a porous or textured surface structure on the cooling element with multiple protrusions and recesses. This porous configuration dramatically increases the effective surface area for gas contact and particle absorption, enhancing absorption efficiency while remaining manufacturable using conventional techniques
Solution Approach 2:
The patent transitions from a smooth two-dimensional surface to a three-dimensional textured surface with protrusions and recesses. This dimensional change increases the contact area with gas flow, improving particle absorption efficiency without significantly complicating the manufacturing process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The enhanced filtering ability of the device significantly reduces the frequency of replacing the adsorbing element, increases facility productivity, and minimizes the risks associated with replacement, while maintaining effective particle absorption.
Implementation Method 1
The temperature of the gas is higher than the temperature of the cold trap. The cylindrical cooling element is disposed within the cooling space, and the temperature of the cylindrical cooling element is lower than the temperature of the gas entering the cooling space. When the gas contacts the surface of the cylindrical cooling element in the cooling space, the temperature of the gas plummets.
Implementation Method 2
part of the particles will be absorbed to the surface of the cylindrical cooling element. By doing so, the cold trap can filter particles in the gas
Data Source
AI summary
A filtering device and a filtering method and a semiconductor fabricating method thereof. The filtering device is used for filtering a gas had a first temperature. The filtering device includes a casing, a cooling mechanism and at least one adsorbing element. The casing has an input opening, an output opening and a cooling space. The gas enters the cooling space through the input opening and leaves the cooling space through the output opening. The cooling mechanism coupled to the casing is used for maintaining the cooling space at a second temperature that is lower than the first temperature. At least one adsorbing element is disposed inside the cooling space and has a plurality of surface-increasing elements arranged in a direction parallel. The plurality of surface-increasing elements arranged in the direction parallel to that the gas flows inside the cooling space for contacting the gas and adsorbing particles in the gas.