Electrostatic Adsorption Substrate Structure for Stress Relief
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing electrostatic chucks face challenges in resisting thermal and physical stress due to concentrated stress points at connections between conductor lines in the mesh-shaped electrodes.
Innovation Solution
The adsorption substrate incorporates a conductive layer and protruding portions with specific shapes, such as tapered or rectangular cross-sections, to minimize stress concentration and enhance resistance to thermal and physical stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a mesh-shaped electrode is used to reduce resistance, then electrical conductivity is improved, but stress concentration occurs at connection points between conductor lines
Solution Approach 1:
The patent applies local quality by creating protruding portions at specific locations where conductor lines connect to the conductive layer. These protruding portions have different geometric properties (extended depth) compared to the surrounding mesh structure, locally enhancing stress distribution at critical connection points while maintaining the overall mesh electrode's electrical conductivity.
Solution Approach 2:
The protruding portions are formed in advance during the manufacturing process, before the electrode is subjected to thermal and physical stress during operation. This preliminary structural modification ensures that stress concentration is prevented from the outset, rather than attempting to repair or reinforce connection points after stress damage occurs.
2Ease of manufacture
If conventional mesh electrode structure is used, then manufacturing is simpler, but delamination occurs due to stress concentration
Solution Approach 1:
Rather than completely redesigning the electrode structure, the patent applies local quality by adding protruding portions only at critical connection points. This maintains the overall simplicity of the mesh electrode manufacturing process while locally enhancing reliability where stress concentration would otherwise cause delamination.
Solution Approach 2:
The electrode structure becomes a composite system combining the conventional mesh conductor lines with additional protruding portions at connection points. This composite structure integrates the simplicity of standard mesh electrodes with the reliability of reinforced connection points, achieving both manufacturing ease and delamination resistance.
Data Source
AI summary
An adsorption substrate according to the present disclosure includes a base, a conductive layer, and a protruding portion. The base has an insulating property. The base has a first surface configured to hold an article to be processed, and a second surface located on an opposite side to the first surface. The conductive layer is located inside the base. The protruding portion has conductivity. The protruding portion protrudes from the conductive layer toward the second surface. The protruding portion extends in a direction parallel to the first surface. The protruding portion has a tapered shape in which a width in a cross section orthogonal to an extending direction is reduced toward the second surface, or a rectangular shape in which the width is uniform.