Atomic Force Microscope Deformable Sample Holder

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Solution Overview

Problem

Atomic force microscopes (AFMs) face limitations in spatial resolution and force measurement due to probe size and fragility, requiring frequent probe replacement and complicating surface evaluation in environments other than air, such as vacuum or liquids.

Innovation Solution

An AFM design featuring a deformable sample holder with a high bending stiffness and macroscopic dimensions, allowing for probe tips without sensors, which simplifies the microscope's design and enables surface interaction detection, enabling evaluation in various media without sensor-related biases.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a micrometric or millimetric probe is used to achieve high spatial resolution, then the spatial resolution is improved, but the probe becomes fragile and requires frequent replacement

Engineering Contradiction:
Improvespatial resolutionVSAvoidprobe durability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The system is divided into a macroscopic probe structure and a separate microscopic tip. The tip (with dimensions of several hundred nanometers to micrometers) is positioned at the end of a macroscopic probe (several centimeters long), allowing the tip to provide high spatial resolution while the macroscopic probe provides mechanical stability and durability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A macroscopic probe structure acts as an intermediary between the user and the microscopic tip. This intermediary provides mechanical support and stability, enabling the fragile tip to function effectively without being directly handled, thus resolving the contradiction between tip precision and overall probe durability

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If a micrometric probe with low mass is used to reduce detection threshold, then the force detection sensitivity is improved, but the probe becomes more fragile and expensive

Engineering Contradiction:
Improveforce detection sensitivityVSAvoidprobe durability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The probe system is segmented into a macroscopic support structure and a microscopic sensing tip. The tip has low mass (picogram to nanogram range) for high force detection sensitivity, while the macroscopic probe provides mechanical strength and durability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system transitions from a purely microscopic probe to a macroscopic-microscopic hybrid structure. The macroscopic dimension (probe length of several centimeters) provides mechanical stability, while the microscopic dimension (tip dimensions) provides detection sensitivity, effectively resolving the contradiction through dimensional scaling

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If a macroscopic probe is used to increase durability and reduce cost, then probe reliability is improved, but the coupling with macroscopic measurement elements may deteriorate detection performance

Engineering Contradiction:
Improveprobe durabilityVSAvoiddetection performance
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The probe is segmented into a macroscopic support structure and a microscopic tip. The macroscopic probe (length > 1 cm) provides durability and allows use of cheaper materials, while the microscopic tip (dimensions of several hundred nanometers to micrometers) maintains detection performance by minimizing coupling with macroscopic measurement elements

Inventive Principle:
Principle #1Segmentation

4Adaptability or versatility

If the probe is introduced into liquid medium or vacuum for surface evaluation, then the applicability to different environments is improved, but the measurement complexity increases

Engineering Contradiction:
Improveenvironmental adaptabilityVSAvoidmeasurement complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The sensing function is extracted from the probe body and concentrated in the tip. This allows the probe to be introduced into liquid media or vacuum environments for surface evaluation, while the macroscopic support structure remains outside the complex environment, simplifying the overall measurement system

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces probe costs, extends probe lifespan, and simplifies surface evaluation in diverse environments by decoupling the sample holder from the probe, maintaining high mechanical properties and resolution.

Implementation Method 1

The interaction between the tip and the surface to be evaluated causes a variation in the mechanical properties of the probe

Methodology Applied
Scientific EffectMechanical interaction: Mechanical Force

Implementation Method 2

The intermittent contact mode consists for example in vibrating the probe at its resonant frequency at a predetermined amplitude. The interaction between the probe tip and the surface causes a variation in the resonant frequency of the probe, thereby a reduction in the amplitude of the vibrations

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 3

This variation is recorded to evaluate the surface, for example by measuring variations in the reflection of a laser beam on the probe

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 4

variations in the electrical properties of a piezoresistive material integrated into the probe

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS11668729B2Atomic force microscope
Publication Date: 2023.06.06 PARIS SCI & LETTRES
  • US11668729B2 patent drawing
  • US11668729B2 patent drawing
  • US11668729B2 patent drawing

AI summary

The present invention relates to an atomic force microscope for evaluating a surface of a sample, comprising a sample holder, having a first zone suitable for receiving the sample mounted in a stationary manner, a probe having a tip able to be positioned facing the surface of the sample, the microscope being configured to allow an adjustment of a position of the tip relative to the surface, and a support, the sample holder having at least one second zone, separate from the first zone and stationary relative to the support, the sample holder being deformable so as to allow a relative movement of the first zone with respect to the second zone, and the microscope comprising a detector able to detect a movement of the first zone relative to the second zone.