AFM Tip Inspection Using Multi-Height Characterization Patterns

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Solution Overview

Problem

Existing atomic force microscopes (AFMs) face challenges in accurately distinguishing between sample abnormalities and tip defects, leading to unreliable inspections and potential damage to the sample.

Innovation Solution

A method using characterization samples with varying heights and surface roughness patterns to inspect the AFM tip, allowing differentiation between tip abnormalities and sample defects, and enabling real-time replacement of damaged tips.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single type of characterization sample is used to inspect the AFM tip, then the inspection process is simple, but the ability to accurately distinguish between tip defects and sample abnormalities is insufficient

Engineering Contradiction:

Improvetip inspection accuracyVSAvoidcharacterization sample structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

The characterization sample is segmented into multiple distinct patterns (first line and space pattern, second line and space pattern, third line and space pattern) with progressively different characteristics. Each pattern targets specific tip defect types, allowing comprehensive tip inspection while maintaining a systematic and manageable sample structure.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention introduces dimensional variation through patterns with different heights (first height, second height lower than first, third height lower than second). This vertical dimension addition enables the detection of tip defects at multiple depth levels, significantly enhancing inspection accuracy without merely increasing horizontal complexity.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If the AFM tip inspection is performed frequently to ensure reliability, then the inspection reliability improves, but the inspection time and productivity decrease

Engineering Contradiction:

ImproveAFM inspection reliabilityVSAvoidinspection throughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The AFM tip inspection is performed as a preliminary action before actual sample measurement. By using the multi-pattern characterization sample to pre-assess tip condition, the system ensures measurement reliability is established in advance, preventing wasted time on defective tips while maintaining high productivity during actual production inspection.

Inventive Principle:

Principle #10Preliminary action

Data Source

PatentUS20250341540A1Method of inspecting tip of atomic force microscope and method of manufacturing semiconductor device

Publication Date: 2025.11.06 SAMSUNG ELECTRONICS CO LTD

AI summary

A method of operating an atomic force microscope (AFM) is provided. The method includes inspecting a sample by using the AFM and inspecting a tip of a probe of the AFM by using a characterization sample. The characterization sample includes a first characterization pattern that includes a line and space pattern of a first height, a second characterization pattern that includes a line and space pattern of a second height that is lower than the first height, and a third characterization pattern that includes a line and space pattern of a third height that is lower than the second height, and includes a rough surface.