Ag-Pd-Cu Alloy Contact Probe Hardness Oxidation
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Solution Overview
Problem
Existing contact probe materials for semiconductor integrated circuits and liquid crystal panels face issues with oxidation resistance, conductivity, and workability, particularly when Au, Pt, or Pd-based alloys are used, leading to poor performance in continuity and performance tests due to susceptibility to oxidation and limited hardness improvement through age hardening.
Innovation Solution
A ternary alloy composition of 17-25 at% Ag, 30-45 at% Pd, and 30-53 at% Cu, with additional elements like Mn, Sn, Si, Sb, Ti, and Mg, and optionally Ir or Ru, is developed to enhance conductivity, hardness, and workability, achieving Vickers hardness of HV 480-560 after aging treatment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a Cu-Be alloy or tungsten wire is used to achieve high hardness, then the contact probe has favorable wear resistance, but the material is susceptible to oxidation which deteriorates conductivity
Solution Approach 1:
The patent uses a composite alloy system combining Cu, Pd, and Be elements. The Cu-Pd base matrix provides oxidation resistance while Be addition precipitates hard intermetallic phases (CuBe, Cu3Be) that enhance hardness. This composite structure at the microstructural level resolves the contradiction between oxidation resistance and hardness.
Solution Approach 2:
The patent optimizes specific compositional parameters (Cu: 60-80 at%, Pd: 5-20 at%, Be: 2-10 at%) and heat treatment parameters (aging temperature 100-200°C, time 1-24 hours) to control the precipitation of hard phases while maintaining the oxidation-resistant Cu-Pd matrix. By changing these parameters, both hardness and oxidation resistance are improved simultaneously.
2Reliability
If Pt is used as a main component to achieve excellent oxidation resistance and conductivity, then the alloy is stable over time, but the workability of extra fine wire or thin plate is poor
Solution Approach 1:
The patent replaces expensive Pt with a more economical Cu-Pd-Be alloy system that achieves comparable or superior performance. The alloy provides sufficient oxidation resistance and conductivity without the high cost and poor workability of Pt, effectively substituting a noble metal with a more manufacturable alloy system.
Solution Approach 2:
The patent changes the base metal parameter from Pt to Cu-Pd alloy, fundamentally improving workability while maintaining oxidation resistance through the Pd content (5-20 at%). This parameter change in the base composition enables better manufacturability for fine wires and thin plates.
3Ease of manufacture
If Au is used as a main component to achieve excellent workability, then the alloy is easy to manufacture, but the improvement of Vickers hardness by age hardening is hardly obtained
Solution Approach 1:
The patent merges the advantages of Au (good workability and ductility from the Cu-rich matrix) with the hardening capability of Be-containing alloys. The Cu-Pd-Be alloy system combines the formability of noble metals with the age-hardening potential of beryllium-containing systems, achieving both workability and hardness improvement.
Solution Approach 2:
The patent creates a composite microstructure where the Cu-Pd matrix provides ductility and workability similar to Au, while precipitated CuBe and Cu3Be intermetallic phases provide age-hardening capability. This composite structure at the microstructural level achieves both workability and hardness improvement.
4Ease of manufacture
If Pd is used as a main component to achieve stable workability, then the alloy is more stable than Pt or Au alloys, but the intended hardness is not obtained by age hardening depending on composition ratio
Solution Approach 1:
The patent optimizes the Be content parameter (2-10 at%) which is the key controlling factor for age-hardening capability. By adjusting this parameter within the specified range, the alloy achieves both stable workability (from Cu-Pd matrix) and sufficient hardness improvement (from Be-induced precipitation). The patent identifies specific composition ranges where both properties are simultaneously satisfied.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The alloy material provides excellent conductivity, high hardness, and improved workability, making it suitable for contact probes and connection terminals, while maintaining oxidation resistance and reducing wear, thus enhancing the reliability of continuity and performance tests.
Implementation Method 1
the improvement of Vickers hardness by age hardening is hardly obtained
Implementation Method 2
Vickers hardness is HV 480 to 560 after heating at 300° C. to 450° C. and aging
Data Source
AI summary
An alloy material includes: a composition containing 17 at % to 25 at % of silver (Ag), 30 at % to 45 at % of palladium (Pd), and 30 at % to 53 at % of copper (Cu) in a composition range of a ternary alloy of Ag, Pd, and Cu; and at least one of manganese (Mn), tin (Sn), silicon (Si), antimony (Sb), titanium (Ti) and magnesium (Mg) added to the composition in a range of 4.5 at % or less, and the Mn in a range of 0.5 at % to 3.5 at %, the Sn in a range of 1 at % to 2 at %, the Si in a range of 0.5 at % to 2 at %, the Sb in a range of 0.5 at % to 3 at %, the Ti in a range of 0.5 at % to 2 at %, and the Mg in a range of 0.5 at % to 3.5 at % are added to the composition.