Aged Polymeric Silsesquioxanes High-Temperature Stability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Incumbent removable polymers used in electronic device and MEMS manufacturing are limited by instability at high temperatures, leading to issues such as mass loss, chemical degradation, and unstrippability, which restrict their use above 400°C and compromise manufacturing efficiency.
Innovation Solution
Development of aged polymeric silsesquioxanes that can be thermally aged from 460°C to 700°C while remaining mass stable and completely strippable using a new liquid fluoride stripper formulation, comprising specific T(H) and T(aryl) constituent units.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If incumbent removable polymers are used at high temperatures above 400°C, then they would be expected to undergo chemical degradation and mass loss, but this leads to unstrippability and contamination of sensitive components
Solution Approach 1:
The patent applies parameter changes by modifying the chemical composition parameters of the polymer to create a high-temperature resistant formulation. The cured polymeric silsesquioxane contains specific T(H) constituent units (where H is hydrogen) and T(aryl) constituent units (where aryl is phenyl or naphthyl) in controlled molar ratios, with the mole fraction of T(H) units being 0.06 to 0.94 and T(aryl) units being 0.06 to 0.80. This compositional parameter optimization enables the material to maintain strippability after thermal aging at temperatures up to 700°C, resolving the contradiction between temperature stability and reliability.
2Temperature
If incumbent removable polymers are exposed to temperatures above 400°C, then they would lose mass and shrink, but this causes them to pull away from electrical/optical components and lose functional properties
Solution Approach 1:
The patent employs composite materials by creating a cured polymeric silsesquoxane that integrates multiple constituent units with complementary properties. The material combines T(H) units providing thermal stability, T(aryl) units offering structural integrity at high temperatures, and optionally T(Alkyl) units for additional property tuning. This composite structure maintains mass stability within 98-102% of initial mass after thermal aging at 460-700°C, preventing shrinkage and detachment from components while preserving functional properties.
3Temperature
If incumbent removable polymers are heated above 400°C, then they would become chemically degraded, but this releases corrosive by-products that contaminate sensitive electronic components
Solution Approach 1:
The patent creates an inert chemical environment within the polymer structure by using silsesquioxane backbone chemistry, which is inherently resistant to thermal decomposition into corrosive by-products. The T(H) and T(aryl) constituent units form a thermally stable network that decomposes into non-corrosive residues when thermally aged at high temperatures. This inert chemical environment prevents contamination of sensitive electronic components during high-temperature processing operations.
4Temperature
If incumbent removable polymers are overheated, then they would become inert towards liquid strippers, but this makes processing and manufacturing operations inefficient or inoperable
Solution Approach 1:
The patent applies preliminary action by performing controlled thermal aging of the cured polymeric silsesquoxane before final device assembly or testing. The material is intentionally exposed to elevated temperatures (460-700°C) in a controlled manner to pre-stabilize its thermal properties and ensure it will maintain performance during subsequent device processing. This preliminary thermal treatment activates the material's high-temperature resistance while preserving itsstrippability, enabling efficient manufacturing operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The aged polymeric silsesquioxanes maintain mass stability and strippability at high temperatures, enabling their use in high-temperature manufacturing processes without compromising performance or efficiency, addressing the limitations of existing polymers.
Implementation Method 1
The aged polymeric silsesquioxanes are made by heating a cured polymeric silsesquioxanes at from 460° to 700° C.
Data Source
AI summary
An aged polymeric silsesquioxane comprising a product of heating a cured polymeric silsesquioxane of formula (I) (see specification) at a temperature of from 460° to 700° C., a formulation comprising the aged polymeric silsesquioxane and at least one additional constituent, methods of making and using the aged polymeric silsesquioxane, and manufactured articles and devices containing the aged polymeric silsesquioxane.