Agile High-Voltage Sequencer for MEMS Control
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Solution Overview
Problem
Existing high-voltage power supplies for micro electromechanical systems (MEMS) and microfluidics applications lack precise control and coordination, relying on open-loop voltage or current control which is insufficient for real-time sensing and reaction requirements.
Innovation Solution
A multiple-channel agile high-voltage sequencer with programmable calculator-style embedded control, integrating high-resolution voltage and current sensing using a novel 'floating monitor' method, enabling advanced open and closed-loop control, complete field reprogrammability, and inter-channel communication for sophisticated automation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If open-loop voltage or current control is used in high-voltage power supplies, then the device complexity is reduced, but the measurement precision and control accuracy deteriorate
Solution Approach 1:
The patent implements closed-loop control by sensing output voltage and current, comparing them with reference values, and adjusting the output accordingly. This feedback mechanism enables precise real-time control of high-voltage channels while maintaining coordinated switching, directly resolving the contradiction between control accuracy and system complexity.
2Adaptability or versatility
If multiple uncoordinated high-voltage supplies are used, then the adaptability to different applications is improved, but the device complexity and coordination difficulty increase
Solution Approach 1:
The patent combines multiple high-voltage power supply channels into a single coordinated system with unified control. Each channel can be independently programmed but operates under centralized coordination, enabling precise multi-channel switching for different applications while eliminating the complexity of coordinating separate unconnected power supplies.
Solution Approach 2:
The patent creates a universal high-voltage sequencer that can perform multiple functions including voltage sourcing, sinking, sensing, and coordinated switching across different applications. The programmable architecture allows the same device to adapt to various experimental configurations, replacing multiple specialized devices with one multi-functional system.
3Reliability
If fixed-function high-voltage power supplies are used, then the manufacturing precision and reliability are improved, but the adaptability and ease of operation deteriorate
Solution Approach 1:
The patent implements field reprogrammability that allows the system to dynamically change its control algorithms and functions without hardware modifications. Users can update firmware to add new features or modify existing ones, enabling the reliable hardware platform to adapt to evolving experimental requirements while maintaining system stability.
4Measurement precision
If real-time sensing and reaction is implemented, then the measurement precision and control accuracy are improved, but the use of energy and device complexity increase
Solution Approach 1:
The patent implements sensing and control only when and where needed in the high-voltage system. The floating monitor methodology enables selective monitoring of critical parameters without continuously measuring all signals, reducing energy consumption while maintaining precision control during active operation phases.
Data Source
AI summary
A high-voltage sequencer system includes positive and negative high-voltage supplies. A supply regulator is connected to the positive high-voltage supply. A master sequencer and programmable logic controller is connected to the supply regulator to control operation thereof. A high voltage regulator output circuit is connected to the supply regulator to receive high voltage signals therefrom. A plurality of sequencer circuits is connected between the master sequencer and programmable logic controller and the high voltage regulator output. The sequencer circuits provide signals to the high voltage regulator output to produce corresponding high-voltage signal outputs in selected sequences.


