Agitation Rod Paddle for Uniform Plating Solution Flow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing plating apparatuses face challenges in increasing plating-solution agitating power without escalating the reciprocating speed of the paddle, which can lead to solution scattering and increased load on the driving device, especially when plating substrates with complex structures like trench or via structures.
Innovation Solution
A paddle design featuring vertically-extending agitation rods with planar portions, slope surfaces, and tip portions is introduced, allowing for enhanced plating-solution agitation by creating specific flow patterns that increase metal ion supply without increasing paddle speed, featuring rods that face in the same or opposite directions and are arranged alternately.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the reciprocating speed of the paddle is increased to increase plating-solution agitating power, then the supply of metal ions to the substrate is improved, but the plating solution scatters and the load on the driving device increases
Solution Approach 1:
The paddle is divided into multiple agitation rods (typically 3-5 rods) arranged parallel to each other, each independently contributing to agitation. This segmentation allows the total agitation power to be distributed across multiple elements, achieving effective metal ion supply without requiring excessive speed from each individual rod, thus reducing solution scattering and driving device load.
Solution Approach 2:
The agitation rods extend vertically into the plating solution, creating a three-dimensional agitation structure. This vertical dimension allows the paddle to agitate solution at multiple depths simultaneously, improving metal ion supply efficiency without increasing horizontal reciprocating speed, thereby avoiding solution scattering.
2Productivity
If the reciprocating speed of the paddle is increased to supply more metal ions, then the plating rate is improved, but the load on the driving device increases
Solution Approach 1:
By segmenting the paddle into multiple agitation rods, the total agitation effect is achieved through distributed action rather than high-speed motion of a single element. This reduces the energy requirements and load on the driving device while maintaining high plating rates through cumulative agitation from multiple rods.
Solution Approach 2:
The invention changes the operational parameters by using multiple rods with optimized spacing and dimensions rather than increasing speed. The agitation effectiveness is achieved through geometric configuration (number of rods, their spacing, and vertical extension) rather than kinetic energy from high speed, reducing driving device load.
3Ease of manufacture
If the paddle structure is simplified for ease of manufacture, then the device complexity is reduced, but the ability to create effective flow patterns for metal ion supply is compromised
Solution Approach 1:
The paddle consists of multiple simple cylindrical or prismatic rods arranged in parallel, which are straightforward to manufacture. Each rod is a basic geometric form that can be easily produced, and the overall structure achieves complex flow patterns through the collective action of these simple elements rather than requiring individually complex components.
Solution Approach 2:
All agitation rods are made with identical or similar dimensions and shapes, using the same material and manufacturing process. This homogeneity simplifies production while the collective arrangement of these uniform rods creates the necessary flow patterns for effective metal ion supply to the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively boosts plating-solution agitating power, ensuring uniform metal ion distribution on substrates, even at lower paddle speeds, thereby preventing solution scattering and reducing the load on the driving device.
Implementation Method 1
The paddle 205 is disposed in the vicinity of the surface of the substrate W held by the substrate holder 204. The paddle 205 is disposed in a vertical position, and reciprocates parallel to the surface of the substrate W to agitate the plating solution so that a sufficient amount of metal ions can be supplied uniformly to the surface of the substrate W during plating of the substrate W.
Implementation Method 2
The anode 202 is connected to a positive pole of a power source 207 via the anode holder 203, while the substrate W is connected to a negative pole of the power source 207 via the substrate holder 204. When a voltage is applied between the anode 202 and the substrate W, an electric current flows to the substrate W, and a metal film is formed on the surface of the substrate W.
Implementation Method 3
The paddle 205 includes a plurality of vertically-extending agitation rods 208. The paddle 205 is disposed in the electric field formed between the anode 202 and the substrate W, and the agitation rods 208 reciprocate horizontally as shown by the arrows while blocking the electric field.
Data Source
AI summary
A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate is disclosed. The paddle includes a plurality of vertically-extending agitation rods. Each agitation rod includes: a planar portion perpendicular to a reciprocating direction of the paddle; two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion; and a tip portion connected with the two slope surfaces.