AGV Dynamic Storage and Transfer for Semiconductor Fab Logistics
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Solution Overview
Problem
Semiconductor factories face challenges in efficiently moving workpieces between locations within the fab, experiencing bottlenecks, congestion, and contamination risks due to reliance on manual transport and existing automated systems, which are prone to errors and contamination.
Innovation Solution
A dynamic storage and transfer system utilizing autonomous guided vehicles (AGVs) for automated, independent movement of containers and workpieces, enabling controlled vertical and horizontal movement, and integration with fab control systems for optimized routing and safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If manual transport is used to move workpieces between locations, then flexibility and adaptability are improved, but contamination risk and error rate increase
Solution Approach 1:
The patent replaces manual mechanical transport with an automated guided vehicle system that uses programmed navigation and automated container handling mechanisms. The AGV incorporates vertical and horizontal movement capabilities with automated container transfer systems, eliminating manual intervention while maintaining transport flexibility through programmable routing and scheduling.
2Productivity
If existing automated material handling systems are used, then productivity is improved, but congestion and bottlenecks occur
Solution Approach 1:
The patent segments the material handling system into multiple independent AGV units, each capable of autonomous operation. This segmentation allows parallel transport operations across multiple routes simultaneously, eliminating single-point bottlenecks. The system divides workpiece transport into discrete container units that can be independently routed and scheduled, improving overall throughput while maintaining system manageability.
Solution Approach 2:
The patent implements dynamic routing and scheduling capabilities where AGVs can adapt their paths and timing in real-time based on system conditions. The automated container handling system dynamically adjusts vertical and horizontal movement sequences to optimize flow and prevent congestion, allowing the system to respond flexibly to changing productivity requirements without creating bottlenecks.
3Productivity
If automated guided vehicles with vertical container movement are used, then material handling efficiency is improved, but device complexity increases
Solution Approach 1:
The patent merges vertical and horizontal movement capabilities into a single integrated AGV platform. The container handling system combines vertical lifting mechanisms with horizontal transfer operations, allowing both movements to be coordinated through a unified control system. This merging reduces overall system complexity compared to having separate vertical and horizontal transport systems while maintaining high material handling efficiency.
Solution Approach 2:
The AGV system is designed with multi-functional container handling capabilities that can perform both vertical storage operations and horizontal transport functions using the same platform. The automated handling system provides universal functionality for different container types and transport scenarios, reducing the need for specialized equipment and simplifying the overall system architecture while improving material handling efficiency.
Data Source
AI summary
A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.